Study of the uniformity and stoichiometry of CoSi2films using Rutherford backscattering spectroscopy and scanning electron microscopy
1989 ◽
Vol 4
(4)
◽
pp. 815-820
◽
1974 ◽
Vol 32
◽
pp. 12-13
Keyword(s):
1977 ◽
Vol 35
◽
pp. 638-639