Growth of hydrogenated amorphous silicon due to controlled ion bombardment from a pure silane plasma

1983 ◽  
Vol 42 (9) ◽  
pp. 801-803 ◽  
Author(s):  
B. Drevillon ◽  
J. Perrin ◽  
J. M. Siefert ◽  
J. Huc ◽  
A. Lloret ◽  
...  
Keyword(s):  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
Ion Bombardment ◽  
Hydrogenated Amorphous ◽  
Silane Plasma

Effect of Ion Bombardment on the Growth and Properties of Hydrogenated Amorphous Silicon-Germanium Alloys

1989 ◽  
Vol 28 (Part 1, No. 1) ◽  
pp. 5-11 ◽  
Author(s):  
Jérôme Perrin ◽  
Yoshihiko Takeda ◽  
Naoto Hirano ◽  
Hideharu Matsuura ◽  
Akihisa Matsuda
Keyword(s):  
Amorphous Silicon ◽  
Silicon Germanium ◽  
Hydrogenated Amorphous Silicon ◽  
Ion Bombardment ◽  
Amorphous Silicon Germanium ◽  
Hydrogenated Amorphous ◽  
Silicon Germanium Alloys

Preparation of stable and photoconductive hydrogenated amorphous silicon from a Xe‐diluted silane plasma

1991 ◽  
Vol 58 (22) ◽  
pp. 2494-2496 ◽  
Author(s):  
A. Matsuda ◽  
S. Mashima ◽  
K. Hasezaki ◽  
A. Suzuki ◽  
S. Yamasaki ◽  
...  
Keyword(s):  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
Hydrogenated Amorphous ◽  
Silane Plasma
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