Effect of Ion Bombardment on the Growth and Properties of Hydrogenated Amorphous Silicon-Germanium Alloys

1989 ◽  
Vol 28 (Part 1, No. 1) ◽  
pp. 5-11 ◽  
Author(s):  
Jérôme Perrin ◽  
Yoshihiko Takeda ◽  
Naoto Hirano ◽  
Hideharu Matsuura ◽  
Akihisa Matsuda
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