Experiments on whistler mode electron-cyclotron resonance plasma startup and heating in an axisymmetric magnetic mirror

J. H. Booske; W. D. Getty; R. M. Gilgenbach; R. A. Jong

doi:10.1063/1.865353

Experiments on whistler mode electron-cyclotron resonance plasma startup and heating in an axisymmetric magnetic mirror

The Physics of Fluids ◽

10.1063/1.865353 ◽

1985 ◽

Vol 28 (10) ◽

pp. 3116 ◽

Cited By ~ 30

Author(s):

J. H. Booske ◽

W. D. Getty ◽

R. M. Gilgenbach ◽

R. A. Jong

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Magnetic Mirror ◽

Electron Cyclotron Resonance Plasma ◽

Whistler Mode ◽

Resonance Plasma

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X-Ray Measurements during Whistler-Mode Electron Cyclotron Resonance Plasma Startup and Heating in an Axisymmetric Magnetic Mirror

IEEE Transactions on Plasma Science ◽

10.1109/tps.1986.4316602 ◽

1986 ◽

Vol 14 (5) ◽

pp. 592-602 ◽

Cited By ~ 1

Author(s):

J. H. Booske ◽

W. D. Getty ◽

R. M. Gilgenbach ◽

T. P. Goodman ◽

E. J. Pitcher ◽

...

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Magnetic Mirror ◽

Electron Cyclotron Resonance Plasma ◽

Whistler Mode ◽

X Ray ◽

Resonance Plasma

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Lower Hybrid Heating of an Electron-Cyclotron-Resonance Plasma in a Canted Magnetic Mirror

IEEE Transactions on Plasma Science ◽

10.1109/tps.1976.4316984 ◽

1976 ◽

Vol 4 (4) ◽

pp. 296-297

Author(s):

W. A. Friedrich ◽

J. L. Shohet

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Magnetic Mirror ◽

Lower Hybrid ◽

Electron Cyclotron Resonance Plasma ◽

Hybrid Heating ◽

Resonance Plasma

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Electron cyclotron resonance plasma enhanced direct current sputtering discharge with magnetic-mirror plasma confinement

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.580660 ◽

1997 ◽

Vol 15 (4) ◽

pp. 1922-1928 ◽

Cited By ~ 12

Author(s):

M. Mišina ◽

Y. Setsuhara ◽

S. Miyake

Keyword(s):

Direct Current ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Magnetic Mirror ◽

Plasma Confinement ◽

Electron Cyclotron Resonance Plasma ◽

Direct Current Sputtering ◽

Resonance Plasma

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Influence of the shear flow on electron cyclotron resonance plasma confinement in an axisymmetric magnetic mirror trap of the electron cyclotron resonance ion source

Review of Scientific Instruments ◽

10.1063/1.3666187 ◽

2012 ◽

Vol 83 (2) ◽

pp. 02A318

Author(s):

I. V. Izotov ◽

S. V. Razin ◽

A. V. Sidorov ◽

V. A. Skalyga ◽

V. G. Zorin ◽

...

Keyword(s):

Shear Flow ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Ion Source ◽

Electron Cyclotron ◽

Magnetic Mirror ◽

Plasma Confinement ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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Electron cyclotron resonance plasma etching of InP in CH4/H2/Ar

Applied Physics Letters ◽

10.1063/1.102487 ◽

1990 ◽

Vol 56 (15) ◽

pp. 1424-1426 ◽

Cited By ~ 52

Author(s):

S. J. Pearton ◽

U. K. Chakrabarti ◽

A. P. Kinsella ◽

D. Johnson ◽

C. Constantine

Keyword(s):

Plasma Etching ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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Effect of nitrogen flow on the properties of carbon nitride films deposited by electron cyclotron resonance plasma-enhanced chemical vapor deposition

Vacuum ◽

10.1016/j.vacuum.2021.110223 ◽

2021 ◽

pp. 110223

Author(s):

Sixu Lin ◽

Dong Xie ◽

Yongliang Tang ◽

Yiwen Wang ◽

Fengjuan Jing ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Carbon Nitride ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Electron Cyclotron ◽

Nitrogen Flow ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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X-ray photoelectron diffraction observation of β-SiC(001) obtained by electron cyclotron resonance plasma assisted growth on Si(001)

Applied Surface Science ◽

10.1016/0169-4332(93)90239-8 ◽

1993 ◽

Vol 68 (4) ◽

pp. 575-582 ◽

Cited By ~ 20

Author(s):

M. Diani ◽

J.L. Bischoff ◽

L. Kubler ◽

D. Bolmont

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

X Ray ◽

Photoelectron Diffraction ◽

Resonance Plasma

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Low-temperature deposition of high-quality silicon dioxide films by sputtering-type electron cyclotron resonance plasma

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.580664 ◽

1997 ◽

Vol 15 (4) ◽

pp. 1951-1954 ◽

Cited By ~ 20

Author(s):

H. Nakashima ◽

K. Furukawa ◽

Y. C. Liu ◽

D. W. Gao ◽

Y. Kashiwazaki ◽

...

Keyword(s):

Low Temperature ◽

Silicon Dioxide ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

High Quality ◽

Electron Cyclotron Resonance Plasma ◽

Low Temperature Deposition ◽

Temperature Deposition ◽

Resonance Plasma

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Deposition of high‐quality TiN using tetra‐isopropoxide titanium in an electron cyclotron resonance plasma process

Applied Physics Letters ◽

10.1063/1.114847 ◽

1995 ◽

Vol 67 (20) ◽

pp. 2934-2935 ◽

Cited By ~ 19

Author(s):

A. Weber ◽

R. Poeckelmann ◽

C.‐P. Klages

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Plasma Process ◽

High Quality ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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Low-damage electron-beam-assisted dry etching of GaAs and AlGaAs using electron cyclotron resonance plasma electron source

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.586892 ◽

1993 ◽

Vol 11 (6) ◽

pp. 2288 ◽

Cited By ~ 4

Author(s):

Heiji Watanabe

Keyword(s):

Electron Beam ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Dry Etching ◽

Plasma Electron ◽

Electron Source ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Plasma Electron Source ◽

Resonance Plasma

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