Electron cyclotron resonance plasma enhanced direct current sputtering discharge with magnetic-mirror plasma confinement

M. Mišina; Y. Setsuhara; S. Miyake

doi:10.1116/1.580660

Electron cyclotron resonance plasma enhanced direct current sputtering discharge with magnetic-mirror plasma confinement

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.580660 ◽

1997 ◽

Vol 15 (4) ◽

pp. 1922-1928 ◽

Cited By ~ 12

Author(s):

M. Mišina ◽

Y. Setsuhara ◽

S. Miyake

Keyword(s):

Direct Current ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Magnetic Mirror ◽

Plasma Confinement ◽

Electron Cyclotron Resonance Plasma ◽

Direct Current Sputtering ◽

Resonance Plasma

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Influence of the shear flow on electron cyclotron resonance plasma confinement in an axisymmetric magnetic mirror trap of the electron cyclotron resonance ion source

Review of Scientific Instruments ◽

10.1063/1.3666187 ◽

2012 ◽

Vol 83 (2) ◽

pp. 02A318

Author(s):

I. V. Izotov ◽

S. V. Razin ◽

A. V. Sidorov ◽

V. A. Skalyga ◽

V. G. Zorin ◽

...

Keyword(s):

Shear Flow ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Ion Source ◽

Electron Cyclotron ◽

Magnetic Mirror ◽

Plasma Confinement ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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Lower Hybrid Heating of an Electron-Cyclotron-Resonance Plasma in a Canted Magnetic Mirror

IEEE Transactions on Plasma Science ◽

10.1109/tps.1976.4316984 ◽

1976 ◽

Vol 4 (4) ◽

pp. 296-297

Author(s):

W. A. Friedrich ◽

J. L. Shohet

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Magnetic Mirror ◽

Lower Hybrid ◽

Electron Cyclotron Resonance Plasma ◽

Hybrid Heating ◽

Resonance Plasma

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X-Ray Measurements during Whistler-Mode Electron Cyclotron Resonance Plasma Startup and Heating in an Axisymmetric Magnetic Mirror

IEEE Transactions on Plasma Science ◽

10.1109/tps.1986.4316602 ◽

1986 ◽

Vol 14 (5) ◽

pp. 592-602 ◽

Cited By ~ 1

Author(s):

J. H. Booske ◽

W. D. Getty ◽

R. M. Gilgenbach ◽

T. P. Goodman ◽

E. J. Pitcher ◽

...

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Magnetic Mirror ◽

Electron Cyclotron Resonance Plasma ◽

Whistler Mode ◽

X Ray ◽

Resonance Plasma

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Influence of a direct current bias on the energy of ions from an electron cyclotron resonance plasma

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.578167 ◽

1992 ◽

Vol 10 (3) ◽

pp. 434-438 ◽

Cited By ~ 48

Author(s):

P. Reinke ◽

S. Schelz ◽

W. Jacob ◽

W. Möller

Keyword(s):

Direct Current ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Direct Current Bias ◽

Resonance Plasma

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Influence of the electron cyclotron resonance plasma confinement on reducing the bremsstrahlung production of an electron cyclotron resonance ion source with metal-dielectric structures

Review of Scientific Instruments ◽

10.1063/1.3070653 ◽

2009 ◽

Vol 80 (1) ◽

pp. 013303 ◽

Cited By ~ 4

Author(s):

L. Schachter ◽

K. E. Stiebing ◽

S. Dobrescu

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Ion Source ◽

Electron Cyclotron ◽

Plasma Confinement ◽

Electron Cyclotron Resonance Plasma ◽

Dielectric Structures ◽

Resonance Plasma

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Experiments on whistler mode electron-cyclotron resonance plasma startup and heating in an axisymmetric magnetic mirror

The Physics of Fluids ◽

10.1063/1.865353 ◽

1985 ◽

Vol 28 (10) ◽

pp. 3116 ◽

Cited By ~ 30

Author(s):

J. H. Booske ◽

W. D. Getty ◽

R. M. Gilgenbach ◽

R. A. Jong

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Magnetic Mirror ◽

Electron Cyclotron Resonance Plasma ◽

Whistler Mode ◽

Resonance Plasma

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Plasma enhanced direct current planar magnetron sputtering technique employing a twinned microwave electron cyclotron resonance plasma source

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1340654 ◽

2001 ◽

Vol 19 (2) ◽

pp. 425-428 ◽

Cited By ~ 4

Author(s):

Xu Jun ◽

Deng Xinlu ◽

Yu Shiji ◽

Lu Wenqi ◽

Ma Tengcai

Keyword(s):

Magnetron Sputtering ◽

Direct Current ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Plasma Source ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Planar Magnetron ◽

Resonance Plasma

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Hydrogen-free diamond-like carbon films prepared by microwave electron cyclotron resonance plasma-enhanced direct current magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2010.07.067 ◽

2010 ◽

Vol 519 (1) ◽

pp. 86-90 ◽

Cited By ~ 10

Author(s):

Lili Ru ◽

Jianjun Huang ◽

Liang Gao ◽

Bing Qi

Keyword(s):

Magnetron Sputtering ◽

Direct Current ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Carbon Films ◽

Electron Cyclotron ◽

Diamond Like Carbon ◽

Electron Cyclotron Resonance Plasma ◽

Direct Current Magnetron Sputtering ◽

Resonance Plasma

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Electron cyclotron resonance plasma etching of InP in CH4/H2/Ar

Applied Physics Letters ◽

10.1063/1.102487 ◽

1990 ◽

Vol 56 (15) ◽

pp. 1424-1426 ◽

Cited By ~ 52

Author(s):

S. J. Pearton ◽

U. K. Chakrabarti ◽

A. P. Kinsella ◽

D. Johnson ◽

C. Constantine

Keyword(s):

Plasma Etching ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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Effect of nitrogen flow on the properties of carbon nitride films deposited by electron cyclotron resonance plasma-enhanced chemical vapor deposition

Vacuum ◽

10.1016/j.vacuum.2021.110223 ◽

2021 ◽

pp. 110223

Author(s):

Sixu Lin ◽

Dong Xie ◽

Yongliang Tang ◽

Yiwen Wang ◽

Fengjuan Jing ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Carbon Nitride ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Electron Cyclotron ◽

Nitrogen Flow ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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