The electrical asymmetry effect in a multi frequency geometrically asymmetric capacitively coupled plasma: A study by a nonlinear global model

2018 ◽  
Vol 123 (18) ◽  
pp. 183303 ◽  
Author(s):  
P. Saikia ◽  
H. Bhuyan ◽  
M. Escalona ◽  
M. Favre ◽  
B. Bora ◽  
...  
Keyword(s):  
Global Model ◽  
Asymmetry Effect ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma

scholarly journals Simulations of electrical asymmetry effect on N2-H2 capacitively coupled plasma by particle-in-cell/Monte Carlo model

2014 ◽  
Vol 63 (18) ◽  
pp. 185205
Author(s):  
Hao Ying-Ying ◽  
Meng Xiu-Lan ◽  
Yao Fu-Bao ◽  
Zhao Guo-Ming ◽  
Wang Jing ◽  
...  
Keyword(s):  
Monte Carlo ◽  
Monte Carlo Model ◽  
Asymmetry Effect ◽  
Capacitively Coupled ◽  
Particle In Cell ◽  
Capacitively Coupled Plasma

scholarly journals A nonlinear global model of single frequency capacitively coupled plasma and its experimental validation

AIP Advances ◽  
2018 ◽  
Vol 8 (4) ◽  
pp. 045113 ◽  
Author(s):  
P. Saikia ◽  
H. Bhuyan ◽  
M. Escalona ◽  
M. Favre ◽  
R. S. Rawat ◽  
...  
Keyword(s):  
Experimental Validation ◽  
Global Model ◽  
Single Frequency ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma

Functional separation of biasing and sustaining voltages in two-frequency capacitively coupled plasma

2000 ◽  
Vol 77 (4) ◽  
pp. 489-491 ◽  
Author(s):  
T. Kitajima ◽  
Y. Takeo ◽  
Z. Lj. Petrović ◽  
T. Makabe
Keyword(s):  
Capacitively Coupled ◽  
Capacitively Coupled Plasma

Effects of magnetic field on the secondary electron asymmetry effect in capacitively coupled plasmas

2021 ◽  
Vol 28 (12) ◽  
pp. 123505
Author(s):  
Shali Yang ◽  
Tianxiang Zhang ◽  
Hanlei Lin ◽  
Hao Wu ◽  
Qiang Zhang
Keyword(s):  
Magnetic Field ◽  
Secondary Electron ◽  
Asymmetry Effect ◽  
Capacitively Coupled ◽  
Coupled Plasmas

scholarly journals Modeling of Perpendicularly Driven Dual-Frequency Capacitively Coupled Plasma

2016 ◽  
Vol 18 (2) ◽  
pp. 143-146
Author(s):  
Hongyu Wang ◽  
Wei Jiang ◽  
Peng Sun ◽  
Shuangyun Zhao ◽  
Yang Li
Keyword(s):  
Dual Frequency ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma
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