A nonlinear global model of single frequency capacitively coupled plasma and its experimental validation

P. Saikia; H. Bhuyan; M. Escalona; M. Favre; R. S. Rawat; E. Wyndham

doi:10.1063/1.5022654

A nonlinear global model of single frequency capacitively coupled plasma and its experimental validation

AIP Advances ◽

10.1063/1.5022654 ◽

2018 ◽

Vol 8 (4) ◽

pp. 045113 ◽

Cited By ~ 1

Author(s):

P. Saikia ◽

H. Bhuyan ◽

M. Escalona ◽

M. Favre ◽

R. S. Rawat ◽

...

Keyword(s):

Experimental Validation ◽

Global Model ◽

Single Frequency ◽

Capacitively Coupled ◽

Capacitively Coupled Plasma

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Study of stochastic heating using particle-in-cell simulation in single frequency capacitively coupled plasma discharges

2012 Abstracts IEEE International Conference on Plasma Science ◽

10.1109/plasma.2012.6383392 ◽

2012 ◽

Author(s):

Sarveshwar Sharma ◽

Miles Turner

Keyword(s):

Single Frequency ◽

Plasma Discharges ◽

Capacitively Coupled ◽

Particle In Cell ◽

Stochastic Heating ◽

Cell Simulation ◽

Capacitively Coupled Plasma

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Simulation study of wave phenomena from the sheath region in single frequency capacitively coupled plasma discharges; field reversals and ion reflection

Physics of Plasmas ◽

10.1063/1.4816952 ◽

2013 ◽

Vol 20 (7) ◽

pp. 073507 ◽

Cited By ~ 16

Author(s):

S. Sharma ◽

M. M. Turner

Keyword(s):

Simulation Study ◽

Single Frequency ◽

Plasma Discharges ◽

Capacitively Coupled ◽

Sheath Region ◽

Capacitively Coupled Plasma ◽

Wave Phenomena

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An analytical model of multi-component radio frequency capacitively coupled plasma and experimental validation

Physics of Plasmas ◽

10.1063/1.4973233 ◽

2017 ◽

Vol 24 (1) ◽

pp. 013503 ◽

Cited By ~ 4

Author(s):

Partha Saikia ◽

Heman Bhuyan ◽

Mario Favre ◽

Edmundo Wyndham ◽

Felipe Veloso

Keyword(s):

Radio Frequency ◽

Analytical Model ◽

Experimental Validation ◽

Capacitively Coupled ◽

Capacitively Coupled Plasma

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The electrical asymmetry effect in a multi frequency geometrically asymmetric capacitively coupled plasma: A study by a nonlinear global model

Journal of Applied Physics ◽

10.1063/1.5023884 ◽

2018 ◽

Vol 123 (18) ◽

pp. 183303 ◽

Cited By ~ 4

Author(s):

P. Saikia ◽

H. Bhuyan ◽

M. Escalona ◽

M. Favre ◽

B. Bora ◽

...

Keyword(s):

Global Model ◽

Asymmetry Effect ◽

Capacitively Coupled ◽

Capacitively Coupled Plasma

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Fluid simulation and experimental validation of plasma radial uniformity in 60 MHz capacitively coupled nitrogen discharges

Journal of Applied Physics ◽

10.1063/1.4913221 ◽

2015 ◽

Vol 117 (8) ◽

pp. 083301 ◽

Cited By ~ 4

Author(s):

Ying-Shuang Liang ◽

Yong-Xin Liu ◽

Yu-Ru Zhang ◽

You-Nian Wang

Keyword(s):

Experimental Validation ◽

Fluid Simulation ◽

Capacitively Coupled

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Dust transport phenomena in a capacitively coupled plasma reactor

Journal of Applied Physics ◽

10.1063/1.1285843 ◽

2001 ◽

Vol 89 (1) ◽

pp. 34-41 ◽

Cited By ~ 4

Author(s):

Heon Chang Kim ◽

Vasilios I. Manousiouthakis

Keyword(s):

Plasma Reactor ◽

Transport Phenomena ◽

Capacitively Coupled ◽

Dust Transport ◽

Capacitively Coupled Plasma

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Modeling and experimental investigation of the plasma uniformity in CF4/O2 capacitively coupled plasmas, operating in single frequency and dual frequency regime

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.4906819 ◽

2015 ◽

Vol 33 (2) ◽

pp. 021310 ◽

Cited By ~ 2

Author(s):

Yu-Ru Zhang ◽

Stefan Tinck ◽

Peter De Schepper ◽

You-Nian Wang ◽

Annemie Bogaerts

Keyword(s):

Experimental Investigation ◽

Single Frequency ◽

Dual Frequency ◽

Capacitively Coupled ◽

Frequency Regime ◽

Coupled Plasmas

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Functional separation of biasing and sustaining voltages in two-frequency capacitively coupled plasma

Applied Physics Letters ◽

10.1063/1.127020 ◽

2000 ◽

Vol 77 (4) ◽

pp. 489-491 ◽

Cited By ~ 187

Author(s):

T. Kitajima ◽

Y. Takeo ◽

Z. Lj. Petrović ◽

T. Makabe

Keyword(s):

Capacitively Coupled ◽

Capacitively Coupled Plasma

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1-D Fluid Modeling of Methane Dissociation in Radiofrequency Capacitively Coupled Plasma

Renewable Energy for Smart and Sustainable Cities - Lecture Notes in Networks and Systems ◽

10.1007/978-3-030-04789-4_55 ◽

2018 ◽

pp. 516-522

Author(s):

Abdelatif Gadoum ◽

Djilali Benyoucef ◽

Mohamed Habib Allah Lahoual

Keyword(s):

Capacitively Coupled ◽

Fluid Modeling ◽

Capacitively Coupled Plasma ◽

Methane Dissociation

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Simulation of cold plasma in a chamber under high- and low-frequency voltage conditions for a capacitively coupled plasma

Journal of Semiconductors ◽

10.1088/1674-4926/33/10/104004 ◽

2012 ◽

Vol 33 (10) ◽

pp. 104004 ◽

Cited By ~ 1

Author(s):

Daoxin Hao ◽

Jia Cheng ◽

Linhong Ji ◽

Yuchun Sun

Keyword(s):

Cold Plasma ◽

Low Frequency ◽

Capacitively Coupled ◽

Capacitively Coupled Plasma

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