Simulations of electrical asymmetry effect on N2-H2 capacitively coupled plasma by particle-in-cell/Monte Carlo model

Hao Ying-Ying;  Meng Xiu-Lan;  Yao Fu-Bao;  Zhao Guo-Ming;  Wang Jing;  Zhang Lian-Zhu

doi:10.7498/aps.63.185205

Simulations of electrical asymmetry effect on N2-H2 capacitively coupled plasma by particle-in-cell/Monte Carlo model

Acta Physica Sinica ◽

10.7498/aps.63.185205 ◽

2014 ◽

Vol 63 (18) ◽

pp. 185205

Author(s):

Hao Ying-Ying ◽

Meng Xiu-Lan ◽

Yao Fu-Bao ◽

Zhao Guo-Ming ◽

Wang Jing ◽

...

Keyword(s):

Monte Carlo ◽

Monte Carlo Model ◽

Asymmetry Effect ◽

Capacitively Coupled ◽

Particle In Cell ◽

Capacitively Coupled Plasma

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Particle-in-Cell/Monte Carlo simulation of CF4 discharge in capacitively coupled plasma reactor

Computer Physics Communications ◽

10.1016/j.cpc.2007.02.011 ◽

2007 ◽

Vol 177 (1-2) ◽

pp. 129-130

Author(s):

Jonghyuk Kang ◽

Ganyoung Park ◽

Jaekoo Lee

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Plasma Reactor ◽

Capacitively Coupled ◽

Particle In Cell ◽

Capacitively Coupled Plasma

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Implicit and electrostatic particle-in-cell/Monte Carlo model in two-dimensional and axisymmetric geometry: II. Self-bias voltage effects in capacitively coupled plasmas

Plasma Sources Science and Technology ◽

10.1088/0963-0252/20/3/035013 ◽

2011 ◽

Vol 20 (3) ◽

pp. 035013 ◽

Cited By ~ 25

Author(s):

Wei Jiang ◽

Hong-yu Wang ◽

Zhen-hua Bi ◽

You-nian Wang

Keyword(s):

Monte Carlo ◽

Bias Voltage ◽

Monte Carlo Model ◽

Two Dimensional ◽

Capacitively Coupled ◽

Particle In Cell ◽

Self Bias ◽

Coupled Plasmas

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Comparison of a one-dimensional particle-in-cell–Monte Carlo model and a one-dimensional fluid model for a CH[sub 4]/H[sub 2] capacitively coupled radio frequency discharge

Journal of Applied Physics ◽

10.1063/1.1461895 ◽

2002 ◽

Vol 91 (10) ◽

pp. 6296 ◽

Cited By ~ 30

Author(s):

Vladimir Ivanov ◽

Olga Proshina ◽

Tatyana Rakhimova ◽

Alexander Rakhimov ◽

Dieter Herrebout ◽

...

Keyword(s):

Monte Carlo ◽

Radio Frequency ◽

Fluid Model ◽

Monte Carlo Model ◽

Capacitively Coupled ◽

One Dimensional ◽

Particle In Cell ◽

Radio Frequency Discharge

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Simulation of Low-Pressure Capacitively Coupled Plasmas Combining a Parallelized Particle-in-Cell Simulation and Direct Simulation of Monte Carlo

IEEE Transactions on Plasma Science ◽

10.1109/tps.2014.2368145 ◽

2014 ◽

Vol 42 (12) ◽

pp. 3819-3824 ◽

Cited By ~ 4

Author(s):

Jin Seok Kim ◽

Min Young Hur ◽

In Cheol Song ◽

Ho-Jun Lee ◽

Hae June Lee

Keyword(s):

Monte Carlo ◽

Low Pressure ◽

Direct Simulation ◽

Capacitively Coupled ◽

Particle In Cell ◽

Cell Simulation ◽

Coupled Plasmas

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A particle-in-cell/Monte Carlo simulation of a capacitively coupled chlorine discharge

2014 IEEE 41st International Conference on Plasma Sciences (ICOPS) held with 2014 IEEE International Conference on High-Power Particle Beams (BEAMS) ◽

10.1109/plasma.2014.7012492 ◽

2014 ◽

Author(s):

Shuo Huang ◽

J. T. Gudmundsson

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Capacitively Coupled ◽

Particle In Cell

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Particle-in-cell/Monte Carlo simulations of a low-pressure capacitively coupled radio-frequency discharge: Effect of adding H2 to an Ar discharge

Journal of Applied Physics ◽

10.1063/1.1563820 ◽

2003 ◽

Vol 93 (9) ◽

pp. 5025-5033 ◽

Cited By ~ 16

Author(s):

E. Neyts ◽

M. Yan ◽

A. Bogaerts ◽

R. Gijbels

Keyword(s):

Monte Carlo ◽

Monte Carlo Simulations ◽

Radio Frequency ◽

Low Pressure ◽

Capacitively Coupled ◽

Particle In Cell ◽

Radio Frequency Discharge

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Study of stochastic heating using particle-in-cell simulation in single frequency capacitively coupled plasma discharges

2012 Abstracts IEEE International Conference on Plasma Science ◽

10.1109/plasma.2012.6383392 ◽

2012 ◽

Author(s):

Sarveshwar Sharma ◽

Miles Turner

Keyword(s):

Single Frequency ◽

Plasma Discharges ◽

Capacitively Coupled ◽

Particle In Cell ◽

Stochastic Heating ◽

Cell Simulation ◽

Capacitively Coupled Plasma

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A benchmark study of a capacitively coupled oxygen discharge of the oopd1 particle-in-cell Monte Carlo code

Plasma Sources Science and Technology ◽

10.1088/0963-0252/22/3/035011 ◽

2013 ◽

Vol 22 (3) ◽

pp. 035011 ◽

Cited By ~ 49

Author(s):

J T Gudmundsson ◽

E Kawamura ◽

M A Lieberman

Keyword(s):

Monte Carlo ◽

Monte Carlo Code ◽

Capacitively Coupled ◽

Particle In Cell ◽

Benchmark Study ◽

Oxygen Discharge

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A particle-in-cell/Monte Carlo simulation of a capacitively coupled chlorine discharge

Plasma Sources Science and Technology ◽

10.1088/0963-0252/22/5/055020 ◽

2013 ◽

Vol 22 (5) ◽

pp. 055020 ◽

Cited By ~ 14

Author(s):

Shuo Huang ◽

J T Gudmundsson

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Capacitively Coupled ◽

Particle In Cell

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Simulation of low-pressure capacitively coupled plasmas using a parallelized particle-in-cell simulation and a direct simulation of Monte Carlo for neutrals

2013 Abstracts IEEE International Conference on Plasma Science (ICOPS) ◽

10.1109/plasma.2013.6633183 ◽

2013 ◽

Author(s):

Jin Seok Kim ◽

In Cheol Song ◽

Ho-Jun Lee ◽

Hae June Lee

Keyword(s):

Monte Carlo ◽

Low Pressure ◽

Direct Simulation ◽

Capacitively Coupled ◽

Particle In Cell ◽

Cell Simulation ◽

Coupled Plasmas

Download Full-text