An analytical model of multi-component radio frequency capacitively coupled plasma and experimental validation

2017 ◽  
Vol 24 (1) ◽  
pp. 013503 ◽  
Author(s):  
Partha Saikia ◽  
Heman Bhuyan ◽  
Mario Favre ◽  
Edmundo Wyndham ◽  
Felipe Veloso
Keyword(s):  
Radio Frequency ◽  
Analytical Model ◽  
Experimental Validation ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma

Rotation of Particles Trapped in the Sheath of a Radio-Frequency Capacitively Coupled Plasma

2004 ◽  
Vol 32 (2) ◽  
pp. 601-606 ◽  
Author(s):  
G.V. Paeva ◽  
R.P. Dahiya ◽  
G.M.W. Kroesen ◽  
W.W. Stoffels
Keyword(s):  
Radio Frequency ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma

The discharge mode transition and O(5p1) production mechanism of pulsed radio frequency capacitively coupled plasma

2012 ◽  
Vol 101 (4) ◽  
pp. 043705 ◽  
Author(s):  
X. Y. Liu ◽  
J. T. Hu ◽  
J. H. Liu ◽  
Z. L. Xiong ◽  
D. W. Liu ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Mode Transition ◽  
Production Mechanism ◽  
Discharge Mode ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma
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