Soft x-ray output from the spherical pinch plasma radiation source (SPX II) for microlithography applications

1994 ◽  
Author(s):  
Jiong Chen ◽  
Emilio Panarella ◽  
B. Hilko ◽  
Haibo Chen
Keyword(s):  
Radiation Source ◽  
Plasma Radiation ◽  
X Ray ◽  
Pinch Plasma ◽  
Spherical Pinch

Characteristics of the spherical pinch plasma radiation source (SPX II) for x-ray, UV, and deep-UV lithography

1993 ◽  
Author(s):  
Shridar Aithal ◽  
Emilio Panarella ◽  
M. Lamari ◽  
B. Hilko ◽  
Robert B. McIntosh
Keyword(s):  
Radiation Source ◽  
Plasma Radiation ◽  
X Ray ◽  
Pinch Plasma ◽  
Uv Lithography ◽  
Deep Uv ◽  
Spherical Pinch

Characterization of multilayer x-ray mirrors for the λ ⋍ 19 nm range using a laser-plasma radiation source

1993 ◽  
Vol 23 (1) ◽  
pp. 76-80 ◽  
Author(s):  
I A Zhitnik ◽  
S V Kuzin ◽  
M M Mitropol'skiĭ ◽  
Evgenii N Ragozin ◽  
V A Slemzin ◽  
...  
Keyword(s):  
Laser Plasma ◽  
Radiation Source ◽  
Plasma Radiation ◽  
X Ray ◽  
Nm Range

Soft x-ray (0.2

2004 ◽  
Vol 75 (10) ◽  
pp. 4026-4028 ◽  
Author(s):  
B. H. Failor ◽  
N. Qi ◽  
J. S. Levine ◽  
H. Sze ◽  
E. M. Gullickson
Keyword(s):  
Plasma Radiation ◽  
X Ray ◽  
Pinch Plasma ◽  
Radiation Sources ◽  
Z Pinch

Micromachining of organic polymers by X-ray photo-etching using a 10Hz laser-plasma radiation source

2005 ◽  
Vol 78-79 ◽  
pp. 452-456 ◽  
Author(s):  
A. Bartnik ◽  
H. Fiedorowicz ◽  
R. Jarocki ◽  
L. Juha ◽  
J. Kostecki ◽  
...  
Keyword(s):  
Laser Plasma ◽  
Radiation Source ◽  
Plasma Radiation ◽  
Organic Polymers ◽  
X Ray

Strong temperature effect on X-ray photo-etching of polytetrafluoroethylene using a 10 Hz laser-plasma radiation source based on a gas puff target

2006 ◽  
Vol 82 (4) ◽  
pp. 529-532 ◽  
Author(s):  
A. Bartnik ◽  
H. Fiedorowicz ◽  
R. Jarocki ◽  
L. Juha ◽  
J. Kostecki ◽  
...  
Keyword(s):  
Temperature Effect ◽  
Laser Plasma ◽  
Radiation Source ◽  
Plasma Radiation ◽  
X Ray
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