Deposition of ZnO based thin films by atmospheric pressure spatial atomic layer deposition for application in solar cells
2017 ◽
Vol 9
(2)
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pp. 021203
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2018 ◽
Vol 10
(6)
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pp. 6006-6013
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2017 ◽
Vol 5
(33)
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pp. 8572-8578
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2016 ◽
Vol 28
(23)
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pp. 8443-8452
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2018 ◽
Vol 57
(49)
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pp. 16224-16227
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1998 ◽
Vol 37
(Part 2, No. 2B)
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pp. L206-L208
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2018 ◽
Vol 17
(3)
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pp. 51-58
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