An N‐Heterocyclic Carbene Based Silver Precursor for Plasma‐Enhanced Spatial Atomic Layer Deposition of Silver Thin Films at Atmospheric Pressure

2018 ◽  
Vol 57 (49) ◽  
pp. 16224-16227 ◽  
Author(s):  
Nils Boysen ◽  
Tim Hasselmann ◽  
Sarah Karle ◽  
Detlef Rogalla ◽  
Detlef Theirich ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atmospheric Pressure ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Silver Thin Films

Plasma-Enhanced Atomic Layer Deposition of Silver Thin Films

2011 ◽  
Vol 23 (11) ◽  
pp. 2901-2907 ◽  
Author(s):  
Maarit Kariniemi ◽  
Jaakko Niinistö ◽  
Timo Hatanpää ◽  
Marianna Kemell ◽  
Timo Sajavaara ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Silver Thin Films

A carbene stabilized precursor for the spatial atomic layer deposition of copper thin films

2020 ◽  
Vol 56 (89) ◽  
pp. 13752-13755
Author(s):  
Nils Boysen ◽  
Bujamin Misimi ◽  
Arbresha Muriqi ◽  
Jan-Lucas Wree ◽  
Tim Hasselmann ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atmospheric Pressure ◽  
Atomic Layer ◽  
First Report ◽  
Layer Deposition

This is the first report on a plasma enhanced spatial atomic layer deposition (APP-ALD) process at atmospheric pressure to grow conducting metallic Cu thin films from a carbene stabilized precursor.

Studies on Thermal Atomic Layer Deposition of Silver Thin Films

2017 ◽  
Vol 29 (5) ◽  
pp. 2040-2045 ◽  
Author(s):  
Maarit Mäkelä ◽  
Timo Hatanpää ◽  
Kenichiro Mizohata ◽  
Kristoffer Meinander ◽  
Jaakko Niinistö ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Silver Thin Films

On the Growth, Percolation and Wetting of Silver Thin Films Grown by Atmospheric-Plasma Enhanced Spatial Atomic Layer Deposition

2016 ◽  
Vol 75 (6) ◽  
pp. 129-142 ◽  
Author(s):  
A. Mameli ◽  
F. van den Bruele ◽  
C. K. Ande ◽  
M. A. Verheijen ◽  
W. M. M. Kessels ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Atmospheric Plasma ◽  
Layer Deposition ◽  
Silver Thin Films

Deposition of ZnO based thin films by atmospheric pressure spatial atomic layer deposition for application in solar cells

2017 ◽  
Vol 9 (2) ◽  
pp. 021203 ◽  
Author(s):  
Viet Huong Nguyen ◽  
João Resende ◽  
Carmen Jiménez ◽  
Jean-Luc Deschanvres ◽  
Perrine Carroy ◽  
...  
Keyword(s):  
Thin Films ◽  
Solar Cells ◽  
Atomic Layer Deposition ◽  
Atmospheric Pressure ◽  
Atomic Layer ◽  
Layer Deposition

scholarly journals Research Update: Atmospheric pressure spatial atomic layer deposition of ZnO thin films: Reactors, doping, and devices

APL Materials ◽  
2015 ◽  
Vol 3 (4) ◽  
pp. 040701 ◽  
Author(s):  
Robert L. Z. Hoye ◽  
David Muñoz-Rojas ◽  
Shelby F. Nelson ◽  
Andrea Illiberi ◽  
Paul Poodt ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atmospheric Pressure ◽  
Atomic Layer ◽  
Zno Thin Films ◽  
Layer Deposition

Radical-Enhanced Atomic Layer Deposition of Silver Thin Films Using Phosphine-Adducted Silver Carboxylates

2007 ◽  
Vol 13 (8) ◽  
pp. 408-413 ◽  
Author(s):  
A. Niskanen ◽  
T. Hatanpää ◽  
K. Arstila ◽  
M. Leskelä ◽  
M. Ritala
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Silver Thin Films
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