Laser-projected photothermal thermography using thermal wave field interference for subsurface defect characterization

2016 ◽  
Vol 109 (12) ◽  
pp. 123504 ◽  
Author(s):  
Erik Thiel ◽  
Marc Kreutzbruck ◽  
Mathias Ziegler
Keyword(s):  
Wave Field ◽  
Thermal Wave ◽  
Defect Characterization ◽  
Subsurface Defect

scholarly journals Thermal-wave slice tomography using wave-field reconstruction

1994 ◽  
Vol 10 (1) ◽  
pp. 185-197 ◽  
Author(s):  
O Pade ◽  
A Mandelis
Keyword(s):  
Wave Field ◽  
Thermal Wave ◽  
Field Reconstruction

Defect characterization for thin films through thermal wave detection

1992 ◽  
Author(s):  
Zhouling Wu ◽  
Michael Reichling ◽  
Eberhard Welsch ◽  
Dieter Schaefer ◽  
Zhengxiu Fan ◽  
...  
Keyword(s):  
Thin Films ◽  
Thermal Wave ◽  
Defect Characterization ◽  
Wave Detection

Advanced methods for surface and subsurface defect characterization of optical components

2000 ◽  
Author(s):  
Joerg Steinert ◽  
Stefan Gliech ◽  
Andreas Wuttig ◽  
Angela Duparre ◽  
Horst Truckenbrodt
Keyword(s):  
Defect Characterization ◽  
Optical Components ◽  
Subsurface Defect

Non-Destructive Measurement of Deep Embedded Defects in Silicon using Photoacoustic Microscope (PAM)

2006 ◽  
Vol 914 ◽  
Author(s):  
Lu Xu ◽  
Donnacha Lowney ◽  
Patrick J McNally ◽  
Eva Gomez Fernandez ◽  
Jennifer Stopford
Keyword(s):  
Heat Diffusion ◽  
Defect Characterization ◽  
Back Side ◽  
Gas Cell ◽  
Subsurface Defect ◽  
Phase Images ◽  
Destructive Measurement ◽  
D Model ◽  
Non Destructive ◽  
Lateral Heat

AbstractAn automatic gas cell photoacoustic microscope has been used to characterize two laser machined air trenches in a silicon substrate from the back side. Both amplitude and phase images reveal the subsurface features. The frequency dependence of the photoacoustic signals with different laser spot sizes was compared with a 1-D model. The effect of lateral heat diffusion on subsurface defect characterization was investigated and the results can be applied to other photothermal techniques.

scholarly journals Thermal-wave slice tomography using wave field reconstruction

1994 ◽  
Vol 04 (C7) ◽  
pp. C7-99-C7-102 ◽  
Author(s):  
O. Pade ◽  
A. Mandelis
Keyword(s):  
Wave Field ◽  
Thermal Wave ◽  
Field Reconstruction
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