scholarly journals Development of low-fluorescence thick photoresist for high-aspect-ratio microstructure in bio-application

2015 ◽  
Vol 9 (2) ◽  
pp. 022405 ◽  
Author(s):  
H. Tamai ◽  
K. Maruo ◽  
H. Ueno ◽  
K. Terao ◽  
H. Kotera ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Thick Photoresist ◽  
High Aspect Ratio Microstructure

A thick photoresist process for high aspect ratio MEMS applications

2016 ◽  
Author(s):  
Elias Laforge ◽  
Ricky Anthony ◽  
Paul McCloskey ◽  
Cian O'Mathúna
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Thick Photoresist

Novel positive-tone thick photoresist for high aspect ratio microsystem technology

2002 ◽  
Vol 8 (4-5) ◽  
pp. 326-329 ◽  
Author(s):  
G.-W. Hsieh ◽  
Y.-S. Hsieh ◽  
C.-R. Yang ◽  
Y.-D. Lee
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Microsystem Technology ◽  
Thick Photoresist

Development of the Soaking Method for Manufacturing Polymer Electrolyte Fuel Cells with a High-Aspect-Ratio Microstructure

2021 ◽  
Vol MA2021-02 (38) ◽  
pp. 1135-1135
Author(s):  
Akihisa Tanaka ◽  
Keisuke Nagato ◽  
Morio Tomizawa ◽  
Kohei Nagai ◽  
Masayuki Nakao
Keyword(s):  
Fuel Cells ◽  
Aspect Ratio ◽  
Polymer Electrolyte ◽  
High Aspect Ratio ◽  
Polymer Electrolyte Fuel Cells ◽  
High Aspect Ratio Microstructure

Graphite membrane applied for high-aspect-ratio microstructure fabrication

2000 ◽  
Author(s):  
Hsiharng Yang ◽  
Min-Chieh Chou ◽  
Horng-Jey Wang ◽  
Chengtang Pan ◽  
Jiang Long Lin
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Microstructure Fabrication ◽  
High Aspect Ratio Microstructure
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