Effects of vacuum-ultraviolet irradiation on copper penetration into low-k dielectrics under bias-temperature stress

2015 ◽  
Vol 106 (1) ◽  
pp. 012904 ◽  
Author(s):  
X. Guo ◽  
S. W. King ◽  
H. Zheng ◽  
P. Xue ◽  
Y. Nishi ◽  
...  
Keyword(s):  
Temperature Stress ◽  
Ultraviolet Irradiation ◽  
Vacuum Ultraviolet ◽  
Bias Temperature Stress ◽  
Low K

Kinetics of Ta ions penetration into porous low-k dielectrics under bias-temperature stress

2010 ◽  
Vol 96 (22) ◽  
pp. 222901 ◽  
Author(s):  
Ming He ◽  
Ya Ou ◽  
Pei-I Wang ◽  
Toh-Ming Lu
Keyword(s):  
Temperature Stress ◽  
Bias Temperature Stress ◽  
Low K ◽  
Kinetics Of

Cu penetration into low-k dielectric during deposition and bias-temperature stress

2010 ◽  
Vol 97 (25) ◽  
pp. 252901 ◽  
Author(s):  
Ming He ◽  
Steven Novak ◽  
Lakshmanan Vanamurthy ◽  
Hassaram Bakhru ◽  
Joel Plawsky ◽  
...  
Keyword(s):  
Temperature Stress ◽  
Bias Temperature Stress ◽  
Low K

Bias-temperature stress of Al on porous low-k dielectrics

2011 ◽  
Vol 51 (8) ◽  
pp. 1342-1345 ◽  
Author(s):  
Ming He ◽  
Huafang Li ◽  
Pei-I Wang ◽  
Toh-Ming Lu
Keyword(s):  
Temperature Stress ◽  
Bias Temperature Stress ◽  
Low K

Effect of vacuum ultraviolet and ultraviolet Irradiation on capacitance-voltage characteristics of low-k-porous organosilicate dielectrics

2010 ◽  
Vol 96 (5) ◽  
pp. 052901 ◽  
Author(s):  
H. Sinha ◽  
J. L. Lauer ◽  
M. T. Nichols ◽  
G. A. Antonelli ◽  
Y. Nishi ◽  
...  
Keyword(s):  
Ultraviolet Irradiation ◽  
Vacuum Ultraviolet ◽  
Capacitance Voltage ◽  
Low K

Bandgap measurements of low-k porous organosilicate dielectrics using vacuum ultraviolet irradiation

2014 ◽  
Vol 104 (6) ◽  
pp. 062904 ◽  
Author(s):  
H. Zheng ◽  
S. W. King ◽  
V. Ryan ◽  
Y. Nishi ◽  
J. L. Shohet
Keyword(s):  
Ultraviolet Irradiation ◽  
Vacuum Ultraviolet ◽  
Low K

Damage to low-k porous organosilicate glass from vacuum-ultraviolet irradiation

2011 ◽  
Author(s):  
J. L. Shohet ◽  
H. Sinha ◽  
H. Ren ◽  
M. T. Nichols ◽  
Y. Nishi ◽  
...  
Keyword(s):  
Ultraviolet Irradiation ◽  
Vacuum Ultraviolet ◽  
Organosilicate Glass ◽  
Low K
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