Optimization of ion-atomic beam source for deposition of GaN ultrathin films

2014 ◽  
Vol 85 (8) ◽  
pp. 083302 ◽  
Author(s):  
Jindřich Mach ◽  
Tomáš Šamořil ◽  
Miroslav Kolíbal ◽  
Jakub Zlámal ◽  
Stanislav Voborny ◽  
...  
Keyword(s):  
Ultrathin Films ◽  
Atomic Beam ◽  
Beam Source ◽  
Atomic Beam Source

Real-time adjustable, 11 μs FWHM, >5 kHz, piezo electric pulsed atomic beam source

2018 ◽  
Vol 89 (10) ◽  
pp. 103115
Author(s):  
Anthony Catanese ◽  
Spencer Horton ◽  
Yusong Liu ◽  
Thomas Weinacht
Keyword(s):  
Real Time ◽  
Atomic Beam ◽  
Beam Source ◽  
Atomic Beam Source ◽  
Piezo Electric

An ultra-low energy (30–200 eV) ion-atomic beam source for ion-beam-assisted deposition in ultrahigh vacuum

2011 ◽  
Vol 82 (8) ◽  
pp. 083302 ◽  
Author(s):  
Jindřich Mach ◽  
Tomáš Šamořil ◽  
Stanislav Voborný ◽  
Miroslav Kolíbal ◽  
Jakub Zlámal ◽  
...  
Keyword(s):  
Atomic Beam ◽  
Ion Beam ◽  
Ultrahigh Vacuum ◽  
Low Energy ◽  
Beam Source ◽  
Atomic Beam Source ◽  
Ion Beam Assisted Deposition

A new atomic beam source: The ‘‘candlestick’’

1994 ◽  
Vol 65 (12) ◽  
pp. 3746-3750 ◽  
Author(s):  
Lene Vestergaard Hau ◽  
J. A. Golovchenko ◽  
Michael M. Burns
Keyword(s):  
Atomic Beam ◽  
Beam Source ◽  
Atomic Beam Source

Beam saturation in the Munich atomic-beam-source

1998 ◽  
Author(s):  
R. Hertenberger ◽  
Y. Eisermann ◽  
A. Hofmann ◽  
A. Metz ◽  
P. Schiemenz ◽  
...  
Keyword(s):  
Atomic Beam ◽  
Beam Source ◽  
Atomic Beam Source

The FILTEX/HERMES polarized hydrogen atomic beam source

1994 ◽  
Vol 343 (2-3) ◽  
pp. 334-342 ◽  
Author(s):  
F. Stock ◽  
K. Rith ◽  
H.G. Gaul ◽  
B. Lorentz ◽  
H. Mairon ◽  
...  
Keyword(s):  
Atomic Beam ◽  
Beam Source ◽  
Atomic Beam Source
Sign in / Sign up

Export Citation Format

Share Document