Enhanced production of electron cyclotron resonance plasma by exciting selective microwave mode on a large-bore electron cyclotron resonance ion source with permanent magnet

2014 ◽  
Vol 85 (2) ◽  
pp. 02A938 ◽  
Author(s):  
Daiju Kimura ◽  
Yosuke Kurisu ◽  
Dai Nozaki ◽  
Keisuke Yano ◽  
Youta Imai ◽  
...  
Keyword(s):  
Permanent Magnet ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Ion Source ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Enhanced Production ◽  
Resonance Plasma

Development of an H− ion source based on the electron cyclotron resonance plasma generator at CEA/Saclay

2004 ◽  
Vol 75 (5) ◽  
pp. 1741-1743 ◽  
Author(s):  
R. Gobin ◽  
O. Delferrière ◽  
R. Ferdinand ◽  
F. Harrault ◽  
K. Benmeziane ◽  
...  
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Plasma Generator ◽  
Ion Source ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma

Compact Electron Cyclotron Resonance Plasma-Etching Reactor Employing Permanent Magnet

1991 ◽  
Vol 30 (Part 1, No. 11B) ◽  
pp. 3159-3163 ◽  
Author(s):  
Akira Narai ◽  
Tetsuro Hashimoto ◽  
Hideki Ichihashi ◽  
Haruo Shindo ◽  
Yasuhiro Horiike
Keyword(s):  
Permanent Magnet ◽  
Plasma Etching ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma
Sign in / Sign up

Export Citation Format

Share Document