Influence of the electron cyclotron resonance plasma confinement on reducing the bremsstrahlung production of an electron cyclotron resonance ion source with metal-dielectric structures

2009 ◽  
Vol 80 (1) ◽  
pp. 013303 ◽  
Author(s):  
L. Schachter ◽  
K. E. Stiebing ◽  
S. Dobrescu
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Ion Source ◽  
Electron Cyclotron ◽  
Plasma Confinement ◽  
Electron Cyclotron Resonance Plasma ◽  
Dielectric Structures ◽  
Resonance Plasma

Development of an H− ion source based on the electron cyclotron resonance plasma generator at CEA/Saclay

2004 ◽  
Vol 75 (5) ◽  
pp. 1741-1743 ◽  
Author(s):  
R. Gobin ◽  
O. Delferrière ◽  
R. Ferdinand ◽  
F. Harrault ◽  
K. Benmeziane ◽  
...  
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Plasma Generator ◽  
Ion Source ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma

Electron cyclotron resonance plasma etching of InP in CH4/H2/Ar

1990 ◽  
Vol 56 (15) ◽  
pp. 1424-1426 ◽  
Author(s):  
S. J. Pearton ◽  
U. K. Chakrabarti ◽  
A. P. Kinsella ◽  
D. Johnson ◽  
C. Constantine
Keyword(s):  
Plasma Etching ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma
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