scholarly journals Effects of permanent magnet arrangements and antenna locations on the generation of multicusp electron cyclotron resonance plasma

1992 ◽  
Vol 63 (1) ◽  
pp. 21-30 ◽  
Author(s):  
Takashi Namura ◽  
Ichio Arikata ◽  
Osamu Fukumasa ◽  
Makoto Kubo ◽  
Ryohei Itatani
Keyword(s):  
Permanent Magnet ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma

Compact Electron Cyclotron Resonance Plasma-Etching Reactor Employing Permanent Magnet

1991 ◽  
Vol 30 (Part 1, No. 11B) ◽  
pp. 3159-3163 ◽  
Author(s):  
Akira Narai ◽  
Tetsuro Hashimoto ◽  
Hideki Ichihashi ◽  
Haruo Shindo ◽  
Yasuhiro Horiike
Keyword(s):  
Permanent Magnet ◽  
Plasma Etching ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma

Electron cyclotron resonance plasma etching of InP in CH4/H2/Ar

1990 ◽  
Vol 56 (15) ◽  
pp. 1424-1426 ◽  
Author(s):  
S. J. Pearton ◽  
U. K. Chakrabarti ◽  
A. P. Kinsella ◽  
D. Johnson ◽  
C. Constantine
Keyword(s):  
Plasma Etching ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma
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