Development of an H− ion source based on the electron cyclotron resonance plasma generator at CEA/Saclay

R. Gobin; O. Delferrière; R. Ferdinand; F. Harrault; K. Benmeziane; G. Gousset; J. D. Sherman

doi:10.1063/1.1695616

Development of an H− ion source based on the electron cyclotron resonance plasma generator at CEA/Saclay

Review of Scientific Instruments ◽

10.1063/1.1695616 ◽

2004 ◽

Vol 75 (5) ◽

pp. 1741-1743 ◽

Cited By ~ 4

Author(s):

R. Gobin ◽

O. Delferrière ◽

R. Ferdinand ◽

F. Harrault ◽

K. Benmeziane ◽

...

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Plasma Generator ◽

Ion Source ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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Enhanced production of electron cyclotron resonance plasma by exciting selective microwave mode on a large-bore electron cyclotron resonance ion source with permanent magnet

Review of Scientific Instruments ◽

10.1063/1.4832068 ◽

2014 ◽

Vol 85 (2) ◽

pp. 02A938 ◽

Cited By ~ 6

Author(s):

Daiju Kimura ◽

Yosuke Kurisu ◽

Dai Nozaki ◽

Keisuke Yano ◽

Youta Imai ◽

...

Keyword(s):

Permanent Magnet ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Ion Source ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Enhanced Production ◽

Resonance Plasma

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A Proposal for a Novel H[sup −] Ion Source Based on Electron Cyclotron Resonance Plasma Heating and Surface Ionization

10.1063/1.3112512 ◽

2009 ◽

Author(s):

O. Tarvainen ◽

S. Kurennoy ◽

Elizabeth Surrey ◽

Alain Simonin

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Plasma Heating ◽

Ion Source ◽

Electron Cyclotron ◽

Surface Ionization ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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An Open-Cavity Electron Cyclotron Resonance Plasma/Ion Source

Japanese Journal of Applied Physics ◽

10.1143/jjap.38.6902 ◽

1999 ◽

Vol 38 (Part 1, No. 12A) ◽

pp. 6902-6907

Author(s):

Fung-Truen Ning ◽

Yuan Hu ◽

Tsang-Lang Lin

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Ion Source ◽

Electron Cyclotron ◽

Open Cavity ◽

Electron Cyclotron Resonance Plasma ◽

Plasma Ion Source ◽

Resonance Plasma

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Influence of the shear flow on electron cyclotron resonance plasma confinement in an axisymmetric magnetic mirror trap of the electron cyclotron resonance ion source

Review of Scientific Instruments ◽

10.1063/1.3666187 ◽

2012 ◽

Vol 83 (2) ◽

pp. 02A318

Author(s):

I. V. Izotov ◽

S. V. Razin ◽

A. V. Sidorov ◽

V. A. Skalyga ◽

V. G. Zorin ◽

...

Keyword(s):

Shear Flow ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Ion Source ◽

Electron Cyclotron ◽

Magnetic Mirror ◽

Plasma Confinement ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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Influence of the electron cyclotron resonance plasma confinement on reducing the bremsstrahlung production of an electron cyclotron resonance ion source with metal-dielectric structures

Review of Scientific Instruments ◽

10.1063/1.3070653 ◽

2009 ◽

Vol 80 (1) ◽

pp. 013303 ◽

Cited By ~ 4

Author(s):

L. Schachter ◽

K. E. Stiebing ◽

S. Dobrescu

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Ion Source ◽

Electron Cyclotron ◽

Plasma Confinement ◽

Electron Cyclotron Resonance Plasma ◽

Dielectric Structures ◽

Resonance Plasma

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Production of electron cyclotron resonance plasma by using multifrequencies microwaves and active beam profile control on a large bore electron cyclotron resonance ion source with permanent magnets

Review of Scientific Instruments ◽

10.1063/1.3277195 ◽

2010 ◽

Vol 81 (2) ◽

pp. 02A313 ◽

Cited By ~ 9

Author(s):

Yushi Kato ◽

Takeyoshi Watanabe ◽

Yuuki Matsui ◽

Yoshiaki Hirai ◽

Osamu Kutsumi ◽

...

Keyword(s):

Cyclotron Resonance ◽

Permanent Magnets ◽

Electron Cyclotron Resonance ◽

Ion Source ◽

Beam Profile ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Profile Control ◽

Resonance Plasma

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Electron cyclotron resonance plasma ion source for material depositions

Review of Scientific Instruments ◽

10.1063/1.1148938 ◽

1998 ◽

Vol 69 (6) ◽

pp. 2320-2324 ◽

Cited By ~ 15

Author(s):

M. Delaunay ◽

E. Touchais

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Ion Source ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Plasma Ion Source ◽

Resonance Plasma

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Electron cyclotron resonance plasma etching of InP in CH4/H2/Ar

Applied Physics Letters ◽

10.1063/1.102487 ◽

1990 ◽

Vol 56 (15) ◽

pp. 1424-1426 ◽

Cited By ~ 52

Author(s):

S. J. Pearton ◽

U. K. Chakrabarti ◽

A. P. Kinsella ◽

D. Johnson ◽

C. Constantine

Keyword(s):

Plasma Etching ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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Effect of nitrogen flow on the properties of carbon nitride films deposited by electron cyclotron resonance plasma-enhanced chemical vapor deposition

Vacuum ◽

10.1016/j.vacuum.2021.110223 ◽

2021 ◽

pp. 110223

Author(s):

Sixu Lin ◽

Dong Xie ◽

Yongliang Tang ◽

Yiwen Wang ◽

Fengjuan Jing ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Carbon Nitride ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Electron Cyclotron ◽

Nitrogen Flow ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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X-ray photoelectron diffraction observation of β-SiC(001) obtained by electron cyclotron resonance plasma assisted growth on Si(001)

Applied Surface Science ◽

10.1016/0169-4332(93)90239-8 ◽

1993 ◽

Vol 68 (4) ◽

pp. 575-582 ◽

Cited By ~ 20

Author(s):

M. Diani ◽

J.L. Bischoff ◽

L. Kubler ◽

D. Bolmont

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

X Ray ◽

Photoelectron Diffraction ◽

Resonance Plasma

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