scholarly journals An in situ x-ray photoelectron spectroscopy study of the initial stages of rf magnetron sputter deposition of indium tin oxide on p-type Si substrate

2013 ◽  
Vol 102 (2) ◽  
pp. 021606 ◽  
Author(s):  
M. H. Rein ◽  
M. V. Hohmann ◽  
A. Thøgersen ◽  
J. Mayandi ◽  
A. O. Holt ◽  
...  
2015 ◽  
Vol 174 ◽  
pp. 532-541 ◽  
Author(s):  
Benedetto Bozzini ◽  
Matteo Amati ◽  
Patrizia Bocchetta ◽  
Simone Dal Zilio ◽  
Axel Knop-Gericke ◽  
...  

2017 ◽  
Vol 799 ◽  
pp. 17-25 ◽  
Author(s):  
Benedetto Bozzini ◽  
Matteo Amati ◽  
Claudio Mele ◽  
Axel Knop-Gericke ◽  
Erik Vesselli

2009 ◽  
Vol 12 (4) ◽  
pp. H109 ◽  
Author(s):  
Jun Kwan Kim ◽  
Jung Wook Lim ◽  
Hyun Tak Kim ◽  
Sang Hoon Kim ◽  
Sun Jin Yun

2019 ◽  
Vol 11 (4) ◽  
pp. 91-102 ◽  
Author(s):  
Carlos Driemeier ◽  
Robert Wallace ◽  
Israel Baumvol

2005 ◽  
Vol 16 (8) ◽  
pp. 1326-1334 ◽  
Author(s):  
V N Strocov ◽  
G E Cirlin ◽  
J Sadowski ◽  
J Kanski ◽  
R Claessen

1997 ◽  
Author(s):  
Ahsen M. Hussain ◽  
Suzanne E. Romaine ◽  
Paul Gorenstein ◽  
John E. Everett ◽  
Ricardo J. Bruni ◽  
...  

1995 ◽  
Vol 382 ◽  
Author(s):  
D. G. Stearns ◽  
K. M. Skulina ◽  
M. Wall ◽  
C. S. Alford ◽  
R. M. Bionta ◽  
...  

ABSTRACTMultilayer (ML) structures composed of Mo-Be, Ru-Be and Rh-Be with bilayer periods of - 6 nm have been grown using dc magnetron sputter deposition. The ML microstructure has been characterized using x-ray diffraction and high-resolution transmission electron microscopy, and the normal incidence reflectivity has been measured at soft x-ray wavelengths.


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