Beryllium-Based Multilayer Structures
Keyword(s):
X Ray
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ABSTRACTMultilayer (ML) structures composed of Mo-Be, Ru-Be and Rh-Be with bilayer periods of - 6 nm have been grown using dc magnetron sputter deposition. The ML microstructure has been characterized using x-ray diffraction and high-resolution transmission electron microscopy, and the normal incidence reflectivity has been measured at soft x-ray wavelengths.
1982 ◽
Vol 40
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pp. 722-723
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2012 ◽
Vol 23
(8)
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pp. 1047-1063
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2012 ◽
Vol 174-177
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pp. 508-511
2007 ◽
Vol 90
(11)
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pp. 3651-3655
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