scholarly journals Rapid thermal annealing effects on the structural properties and density of defects in SiO2 and SiNx:H films deposited by electron cyclotron resonance

2000 ◽  
Vol 87 (3) ◽  
pp. 1187-1192 ◽  
Author(s):  
E. San Andrés ◽  
A. del Prado ◽  
F. L. Martı́nez ◽  
I. Mártil ◽  
D. Bravo ◽  
...  
Keyword(s):  
Structural Properties ◽  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Annealing Effects

scholarly journals Optical and structural properties of SiOxNyHz films deposited by electron cyclotron resonance and their correlation with composition

2003 ◽  
Vol 93 (11) ◽  
pp. 8930-8938 ◽  
Author(s):  
A. del Prado ◽  
E. San Andrés ◽  
I. Mártil ◽  
G. González-Diaz ◽  
D. Bravo ◽  
...  
Keyword(s):  
Structural Properties ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron

Optical and structural properties of SiC layers grown by an electron cyclotron resonance CVD technique

2001 ◽  
Vol 10 (3-7) ◽  
pp. 1264-1267 ◽  
Author(s):  
F Giorgis ◽  
A Chiodoni ◽  
G Cicero ◽  
S Ferrero ◽  
P Mandracci ◽  
...  
Keyword(s):  
Structural Properties ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron

Rapid thermal annealing effects on electrical and structural properties of Pd/Au Schottky contacts to n-type InP(111)

2008 ◽  
Vol 206 (2) ◽  
pp. 250-255 ◽  
Author(s):  
M. Bhaskar Reddy ◽  
V. Janardhanam ◽  
A. Ashok Kumar ◽  
V. Rajagopal Reddy ◽  
P. Narasimha Reddy
Keyword(s):  
Structural Properties ◽  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
Schottky Contacts ◽  
Annealing Effects
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