Degradation measurements using fully processed test transistors in high density plasma reactors for failure analysis

1997 ◽  
Vol 15 (6) ◽  
pp. 1913 ◽  
Author(s):  
Ravisangar Muniandy
Keyword(s):  
Failure Analysis ◽  
High Density ◽  
Plasma Reactors ◽  
Density Plasma

Simulation of dielectric etch in high density plasma reactors

1998 ◽  
Author(s):  
Justine Johannes ◽  
Paul Miller ◽  
Demetre Economou ◽  
John Feldsein ◽  
Timothy Dalton ◽  
...  
Keyword(s):  
High Density ◽  
Plasma Reactors ◽  
Density Plasma

Modeling of SiO2 deposition in high density plasma reactors and comparisons of model predictions with experimental measurements

1998 ◽  
Vol 16 (2) ◽  
pp. 544-563 ◽  
Author(s):  
Ellen Meeks ◽  
Richard S. Larson ◽  
Pauline Ho ◽  
Christopher Apblett ◽  
Sang M. Han ◽  
...  
Keyword(s):  
High Density ◽  
Experimental Measurements ◽  
Plasma Reactors ◽  
Model Predictions ◽  
Density Plasma

Diagnostics of high density plasma reactors used in the processing of electronic and photonic materials (invited) (abstract)

1992 ◽  
Vol 63 (10) ◽  
pp. 4920-4920
Author(s):  
Richard A. Gottscho ◽  
Toshiki Nakano ◽  
Nader Sadeghi ◽  
Dennis J. Trevor ◽  
T. C. Lee
Keyword(s):  
High Density ◽  
Plasma Reactors ◽  
Photonic Materials ◽  
Density Plasma

Incidence angle distributions of ions bombarding grounded surfaces in high density plasma reactors

1998 ◽  
Vol 1 (1) ◽  
pp. 75-82 ◽  
Author(s):  
E.S Aydil ◽  
B.O.M Quiniou ◽  
J.T.C Lee ◽  
J.A Gregus ◽  
R.A Gottscho
Keyword(s):  
Incidence Angle ◽  
High Density ◽  
Plasma Reactors ◽  
Density Plasma

Energy distribution of ions bombarding biased electrodes in high density plasma reactors

1999 ◽  
Vol 17 (2) ◽  
pp. 506-516 ◽  
Author(s):  
Erik A. Edelberg ◽  
Andrew Perry ◽  
Neil Benjamin ◽  
Eray S. Aydil
Keyword(s):  
Energy Distribution ◽  
High Density ◽  
Plasma Reactors ◽  
Density Plasma

Using the scanning electron microscope for failure analysis of high density magnetic media

1987 ◽  
Vol 45 ◽  
pp. 392-393
Author(s):  
Evelyn R. Ackerman ◽  
Gary D. Burnett
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Failure Analysis ◽  
High Density ◽  
Magnetic Media ◽  
Specific Data ◽  
Retrieval Systems ◽  
Operating Environments ◽  
The Media ◽  
Scanning Electron

Advancements in state of the art high density Head/Disk retrieval systems has increased the demand for sophisticated failure analysis methods. From 1968 to 1974 the emphasis was on the number of tracks per inch. (TPI) ranging from 100 to 400 as summarized in Table 1. This emphasis shifted with the increase in densities to include the number of bits per inch (BPI). A bit is formed by magnetizing the Fe203 particles of the media in one direction and allowing magnetic heads to recognize specific data patterns. From 1977 to 1986 the tracks per inch increased from 470 to 1400 corresponding to an increase from 6300 to 10,800 bits per inch respectively. Due to the reduction in the bit and track sizes, build and operating environments of systems have become critical factors in media reliability.Using the Ferrofluid pattern developing technique, the scanning electron microscope can be a valuable diagnostic tool in the examination of failure sites on disks.

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