Theoretical investigation of the influence of space charges on ferroelectric properties of PbZrTiO3 thin film capacitor

1999 ◽  
Vol 86 (2) ◽  
pp. 1096-1105 ◽  
Author(s):  
L. Baudry
Keyword(s):  
Thin Film ◽  
Theoretical Investigation ◽  
Ferroelectric Properties ◽  
Film Capacitor ◽  
Thin Film Capacitor ◽  
Space Charges

Interconnect-Related Degradation of PZT Capacitor for FeRAM

1998 ◽  
Vol 541 ◽  
Author(s):  
S. Kobayashi ◽  
K. Amanuma ◽  
H. Hada
Keyword(s):  
Thin Film ◽  
Ferroelectric Properties ◽  
Film Capacitor ◽  
Thin Film Capacitor ◽  
Pzt Film ◽  
Pzt Thin Film ◽  
Possible Cause

AbstractFerroelectric properties of a Pb(Zr,Ti)O3 (PZT) thin film capacitor with a conventional Al/TiN/Ti interconnect are seriously degraded by annealing at around 400°C. The degradation of the PZT capacitor is reduced as the interconnects are narrowed while the total area of the interconnects on the capacitor is fixed. This result cannot be understood by supposing that Ti diffusion into PZT degrades the ferroelectric properties. A possible cause for the degradation is stress placed on the PZT film during the 400°C annealing.

Spalling Technology of PZT Thin Film Capacitor using Internal Stress

2014 ◽  
Vol 134 (4) ◽  
pp. 85-89
Author(s):  
Kazutaka Sueshige ◽  
Fumiaki Honda ◽  
Tadatomo Suga ◽  
Masaaki Ichiki ◽  
Toshihiro Itoh
Keyword(s):  
Thin Film ◽  
Internal Stress ◽  
Film Capacitor ◽  
Thin Film Capacitor ◽  
Pzt Thin Film

Optimized Fabrication Process of PZT Thin Film Capacitor for MMIC Applications

2009 ◽  
Author(s):  
R. A. Bakar ◽  
S. Sulaiman ◽  
N. F. M. Lazim ◽  
Z. Awang ◽  
Mohamad Rusop ◽  
...  
Keyword(s):  
Thin Film ◽  
Fabrication Process ◽  
Film Capacitor ◽  
Thin Film Capacitor ◽  
Pzt Thin Film

scholarly journals Thin-Film Capacitor Technology for Improving Broadband Power Integrity

2019 ◽  
Vol 9 (7) ◽  
pp. 1319-1327
Author(s):  
William B. Kuhn ◽  
Andrew D. Fund ◽  
J. Ambrose Wolf ◽  
Robert W. Schwartz ◽  
James Claypool ◽  
...  
Keyword(s):  
Thin Film ◽  
Power Integrity ◽  
Film Capacitor ◽  
Thin Film Capacitor

Thin-film capacitor based on the strontium titanate formed by the sol gel technique

2015 ◽  
Vol 44 (6) ◽  
pp. 425-429 ◽  
Author(s):  
Kh. Sokhrabi Anaraki ◽  
N. V. Gaponenko ◽  
M. V. Rudenko ◽  
V. V. Kolos ◽  
A. N. Petlitskii ◽  
...  
Keyword(s):  
Thin Film ◽  
Strontium Titanate ◽  
Sol Gel ◽  
Film Capacitor ◽  
Thin Film Capacitor ◽  
Gel Technique
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