Dependence of growth and nanomechanical properties of ultrathin amorphous carbon films on radio frequency sputtering conditions

1999 ◽  
Vol 86 (4) ◽  
pp. 2268-2277 ◽  
Author(s):  
W. Lu ◽  
K. Komvopoulos
Keyword(s):  
Radio Frequency ◽  
Amorphous Carbon ◽  
Carbon Films ◽  
Amorphous Carbon Films ◽  
Nanomechanical Properties ◽  
Radio Frequency Sputtering

Formation of diamondlike nanocrystallites in amorphous carbon films synthesized by radio-frequency sputtering

2008 ◽  
Vol 23 (3) ◽  
pp. 700-703 ◽  
Author(s):  
D. Wan ◽  
K. Komvopoulos
Keyword(s):  
Carbon Atom ◽  
Radio Frequency ◽  
Amorphous Carbon ◽  
Rf Sputtering ◽  
Film Surface ◽  
Carbon Films ◽  
Fast Fourier Transformation ◽  
Process Conditions ◽  
Tem Analysis ◽  
Radio Frequency Sputtering

Transmission electron microscopy (TEM) and fast Fourier transformation (FFT) analysis were used to examine the microstructures of amorphous carbon (a-C) films deposited on Si(100) by radio-frequency (rf) sputtering without magnetron. TEM analysis revealed that a-C films synthesized under certain deposition conditions contained randomly dispersed nanocrystallites ∼35 Å in size. FFT results indicated that the nanocrystallites possessed diamondlike cubic structures with their close-packed {111} planes parallel to the film surface. The formation of diamondlike nanocrystallites is attributed to metastable carbon atom clusters of trigonal carbon hybridization that were sputtered off from the graphite target under certain process conditions. Cluster distortion upon deposition onto the growing film surface by the bombarding Ar+ ions promoted tetrahedral carbon atom hybridization and, possibly, epitaxial growth of diamondlike nanocrystallites for a short duration.

Microstructure and Nanomechanical Properties of Amorphous Carbon Thin Films Prepared by Pulsed Laser Deposition in Various Atmospheres

2000 ◽  
Vol 616 ◽  
Author(s):  
Q. Wei ◽  
S. Yamolenko ◽  
J. Sankar ◽  
A.K. Sharma ◽  
Y. Yamagata ◽  
...  
Keyword(s):  
Thin Films ◽  
Pulsed Laser Deposition ◽  
Amorphous Carbon ◽  
Pulsed Laser ◽  
Carbon Films ◽  
Laser Deposition ◽  
Chamber Pressure ◽  
Amorphous Carbon Films ◽  
Nanomechanical Properties ◽  
Bonding Characteristics

AbstractWe have investigated the effect of chamber pressure and atmosphere on the microstructure and nanomechanical properties of amorphous diamondlike carbon (DLC) thin films prepared by pulsed laser deposition. The amorphous carbon films were deposited in various atmospheres such as nitrogen and argon at different pressures. We used Raman spectroscopy and optical microscopy to study the bonding characteristics and microstructures of the DLC films. Nanoindentation measurements were carried out on various samples prepared under different conditions to study the effect of chamber pressure and atmosphere on the elastic modulus and nano-hardness of the films. It was found that reduced vacuum leads to softer amorphous carbon films. Amorphous carbon films prepared in higher pressures exhibit increased density of particulates, and significantly rough surface. The results were understood in terms of thermalization of the laser plasma due to increased possibility of collision.

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