Friction, nanostructure, and residual stress of single-layer and multi-layer amorphous carbon films deposited by radio-frequency sputtering

2016 ◽  
Vol 31 (13) ◽  
pp. 1857-1864 ◽  
Author(s):  
Jun Xie ◽  
Kyriakos Komvopoulos
Keyword(s):  
Residual Stress ◽  
Radio Frequency ◽  
Amorphous Carbon ◽  
Single Layer ◽  
Carbon Films ◽  
Amorphous Carbon Films ◽  
Radio Frequency Sputtering ◽  
Image Position

Abstract

Formation of diamondlike nanocrystallites in amorphous carbon films synthesized by radio-frequency sputtering

2008 ◽  
Vol 23 (3) ◽  
pp. 700-703 ◽  
Author(s):  
D. Wan ◽  
K. Komvopoulos
Keyword(s):  
Carbon Atom ◽  
Radio Frequency ◽  
Amorphous Carbon ◽  
Rf Sputtering ◽  
Film Surface ◽  
Carbon Films ◽  
Fast Fourier Transformation ◽  
Process Conditions ◽  
Tem Analysis ◽  
Radio Frequency Sputtering

Transmission electron microscopy (TEM) and fast Fourier transformation (FFT) analysis were used to examine the microstructures of amorphous carbon (a-C) films deposited on Si(100) by radio-frequency (rf) sputtering without magnetron. TEM analysis revealed that a-C films synthesized under certain deposition conditions contained randomly dispersed nanocrystallites ∼35 Å in size. FFT results indicated that the nanocrystallites possessed diamondlike cubic structures with their close-packed {111} planes parallel to the film surface. The formation of diamondlike nanocrystallites is attributed to metastable carbon atom clusters of trigonal carbon hybridization that were sputtered off from the graphite target under certain process conditions. Cluster distortion upon deposition onto the growing film surface by the bombarding Ar+ ions promoted tetrahedral carbon atom hybridization and, possibly, epitaxial growth of diamondlike nanocrystallites for a short duration.

Ion beam energy dependence of surface and structural properties of amorphous carbon films deposited by IBSD method on Ni–Cu alloy

2017 ◽  
Vol 32 (07) ◽  
pp. 1258-1266 ◽  
Author(s):  
Elham Mohagheghpour ◽  
Marjan Rajabi ◽  
Reza Gholamipour ◽  
Majid M. Larijani ◽  
Shahab Sheibani
Keyword(s):  
Structural Properties ◽  
Energy Dependence ◽  
Amorphous Carbon ◽  
Beam Energy ◽  
Ion Beam ◽  
Carbon Films ◽  
Amorphous Carbon Films ◽  
Cu Alloy ◽  
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Abstract

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