Stability of ultrathin amorphous carbon films deposited on smooth silicon substrates by radio frequency sputtering

2001 ◽  
Vol 89 (4) ◽  
pp. 2422-2433 ◽  
Author(s):  
W. Lu ◽  
K. Komvopoulos ◽  
S. W. Yeh
Keyword(s):  
Radio Frequency ◽  
Amorphous Carbon ◽  
Carbon Films ◽  
Silicon Substrates ◽  
Amorphous Carbon Films ◽  
Radio Frequency Sputtering

Formation of diamondlike nanocrystallites in amorphous carbon films synthesized by radio-frequency sputtering

2008 ◽  
Vol 23 (3) ◽  
pp. 700-703 ◽  
Author(s):  
D. Wan ◽  
K. Komvopoulos
Keyword(s):  
Carbon Atom ◽  
Radio Frequency ◽  
Amorphous Carbon ◽  
Rf Sputtering ◽  
Film Surface ◽  
Carbon Films ◽  
Fast Fourier Transformation ◽  
Process Conditions ◽  
Tem Analysis ◽  
Radio Frequency Sputtering

Transmission electron microscopy (TEM) and fast Fourier transformation (FFT) analysis were used to examine the microstructures of amorphous carbon (a-C) films deposited on Si(100) by radio-frequency (rf) sputtering without magnetron. TEM analysis revealed that a-C films synthesized under certain deposition conditions contained randomly dispersed nanocrystallites ∼35 Å in size. FFT results indicated that the nanocrystallites possessed diamondlike cubic structures with their close-packed {111} planes parallel to the film surface. The formation of diamondlike nanocrystallites is attributed to metastable carbon atom clusters of trigonal carbon hybridization that were sputtered off from the graphite target under certain process conditions. Cluster distortion upon deposition onto the growing film surface by the bombarding Ar+ ions promoted tetrahedral carbon atom hybridization and, possibly, epitaxial growth of diamondlike nanocrystallites for a short duration.

Channel Switching Effect and Magnetoresistance in Iron Doped Amorphous Carbon Films on Silicon Substrates

2011 ◽  
Vol 47 (10) ◽  
pp. 2732-2734 ◽  
Author(s):  
Caihua Wan ◽  
Xiaozhong Zhang ◽  
Johan Vanacken ◽  
Xili Gao ◽  
Xinyu Tan ◽  
...  
Keyword(s):  
Amorphous Carbon ◽  
Carbon Films ◽  
Silicon Substrates ◽  
Switching Effect ◽  
Channel Switching ◽  
Amorphous Carbon Films ◽  
Iron Doped

Photoconductivity of iron doped amorphous carbon films on n-type silicon substrates

2009 ◽  
Vol 95 (2) ◽  
pp. 022105 ◽  
Author(s):  
Caihua Wan ◽  
Xiaozhong Zhang ◽  
Xin Zhang ◽  
Xili Gao ◽  
Xinyu Tan
Keyword(s):  
Amorphous Carbon ◽  
Carbon Films ◽  
Silicon Substrates ◽  
Amorphous Carbon Films ◽  
Type Silicon ◽  
Iron Doped
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