Effect of stress-induced phase transformation on nanomechanical properties of sputtered amorphous carbon films
Keyword(s):
2001 ◽
Vol 19
(1)
◽
pp. 311-316
◽
2005 ◽
Vol 14
(9)
◽
pp. 1535-1542
◽
1990 ◽
Vol 48
(1)
◽
pp. 318-319
2019 ◽
Vol 96
◽
pp. 74-84
◽