Investigation of radio frequency plasma for the growth of diamond like carbon films

2012 ◽  
Vol 19 (3) ◽  
pp. 033515 ◽  
Author(s):  
Ishpal ◽  
Sushil Kumar ◽  
Neeraj Dwivedi ◽  
C. M. S. Rauthan
Keyword(s):  
Radio Frequency ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Radio Frequency Plasma ◽  
Frequency Plasma

Diamond-like carbon films deposited in a dual microwave-radio-frequency plasma

1992 ◽  
Vol 11 (1-4) ◽  
pp. 321-324 ◽  
Author(s):  
O.M. Küttel ◽  
L. Martinu ◽  
D. Poitras ◽  
J.E. Klemberg-Sapieha ◽  
M.R. Wertheimer
Keyword(s):  
Radio Frequency ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Radio Frequency Plasma ◽  
Frequency Plasma ◽  
Microwave Radio

scholarly journals Evidence of Carboxyl Modification of Hydrogen-Free Diamond-Like Carbon Films Assisted by Radio Frequency Plasma in Vacuum

2012 ◽  
Vol 2012 ◽  
pp. 1-6 ◽  
Author(s):  
Yuqi Xue ◽  
Zixin Wang ◽  
Jun Wang ◽  
Changji Hu ◽  
Fangyan Xie ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Carbon Films ◽  
Rf Plasma ◽  
Diamond Like Carbon ◽  
Spectra Analysis ◽  
Force Microscopy ◽  
Atomic Force ◽  
Frequency Plasma ◽  
Ft Ir

Modification of hydrogen-free diamond-like carbon (DLC) is presented, with acrylic acid (AA) vapor carried into a vacuum chamber by argon and with the in situ assistance of low-power radio frequency (RF) plasma at a temperature below 100°C. Measured by atomic force microscopy (AFM) technique, the roughness (Ra) of the DLC was 1.063±0.040 nm. XPS and FT-IR spectra analysis showed that carboxyl groups were immobilized on the surface of the DLC films, with about 40% of carboxyl group area coverage. It was found that the RF plasma and reaction time are important in enhancing the modification rate and efficiency.

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