Morphology and Growth Process of Carbon Films Prepared by Microwave / Radio Frequency Plasma Assisted CVD

2008 ◽  
Vol 10 (7) ◽  
pp. 651-656 ◽  
Author(s):  
W. Kaczorowski ◽  
P. Niedzielski
Keyword(s):  
Radio Frequency ◽  
Growth Process ◽  
Carbon Films ◽  
Radio Frequency Plasma ◽  
Frequency Plasma ◽  
Microwave Radio

Diamond-like carbon films deposited in a dual microwave-radio-frequency plasma

1992 ◽  
Vol 11 (1-4) ◽  
pp. 321-324 ◽  
Author(s):  
O.M. Küttel ◽  
L. Martinu ◽  
D. Poitras ◽  
J.E. Klemberg-Sapieha ◽  
M.R. Wertheimer
Keyword(s):  
Radio Frequency ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Radio Frequency Plasma ◽  
Frequency Plasma ◽  
Microwave Radio

Ion energy distributions in dual‐ and single‐mode microwave/radio‐frequency plasma

1995 ◽  
Vol 78 (8) ◽  
pp. 4855-4858 ◽  
Author(s):  
P. Reinke ◽  
S. Bureau ◽  
J. E. Klemberg‐Sapieha ◽  
L. Martinu
Keyword(s):  
Radio Frequency ◽  
Single Mode ◽  
Radio Frequency Plasma ◽  
Energy Distributions ◽  
Ion Energy ◽  
Frequency Plasma ◽  
Microwave Radio ◽  
Ion Energy Distributions

Investigation of radio frequency plasma for the growth of diamond like carbon films

2012 ◽  
Vol 19 (3) ◽  
pp. 033515 ◽  
Author(s):  
Ishpal ◽  
Sushil Kumar ◽  
Neeraj Dwivedi ◽  
C. M. S. Rauthan
Keyword(s):  
Radio Frequency ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Radio Frequency Plasma ◽  
Frequency Plasma

Dual‐mode microwave/radio frequency plasma deposition of dielectric thin films

1989 ◽  
Vol 54 (26) ◽  
pp. 2645-2647 ◽  
Author(s):  
L. Martinu ◽  
J. E. Klemberg‐Sapieha ◽  
M. R. Wertheimer
Keyword(s):  
Thin Films ◽  
Radio Frequency ◽  
Plasma Deposition ◽  
Radio Frequency Plasma ◽  
Dual Mode ◽  
Dielectric Thin Films ◽  
Frequency Plasma ◽  
Microwave Radio
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