Low-Pressure Small-Radius Hydrogen Discharge as a Volume-Production Based Source of Negative Ions

2011 ◽  
Author(s):  
Tsvetelina V. Paunska ◽  
Antonia P. Shivarova ◽  
Khristo Ts. Tarnev ◽  
Yasuhiko Takeiri ◽  
Katsuyoshi Tsumori
Keyword(s):  
Negative Ions ◽  
Low Pressure ◽  
Small Radius ◽  
Hydrogen Discharge ◽  
Volume Production

A small radius hydrogen discharge: An effective source of volume produced negative ions

2010 ◽  
Vol 107 (8) ◽  
pp. 083301 ◽  
Author(s):  
Ts. Paunska ◽  
A. Shivarova ◽  
Kh. Tarnev
Keyword(s):  
Negative Ions ◽  
Small Radius ◽  
Hydrogen Discharge ◽  
Effective Source

scholarly journals Effect of Low-Pressure Plasma Treatment Parameters on Wrinkle Features

Materials ◽  
2020 ◽  
Vol 13 (17) ◽  
pp. 3852
Author(s):  
Bongjun Gu ◽  
Dongwook Ko ◽  
Sungjin Jo ◽  
Dong Choon Hyun ◽  
Hyeon-Ju Oh ◽  
...  
Keyword(s):  
Power Flow ◽  
Treatment Time ◽  
Argon Plasma ◽  
Negative Ions ◽  
Low Pressure ◽  
Nitrogen Plasma ◽  
Pressure Plasma ◽  
Positive Ions ◽  
Low Pressure Plasma ◽  
Optical Adhesive

Wrinkles attract significant attention due to their ability to enhance the mechanical and optical characteristics of various optoelectronic devices. We report the effect of the plasma gas type, power, flow rate, and treatment time on the wrinkle features. When an optical adhesive was treated using a low-pressure plasma of oxygen, argon, and nitrogen, the oxygen and argon plasma generated wrinkles with the lowest and highest wavelengths, respectively. The increase in the power of the nitrogen and oxygen plasma increased the wavelengths and heights of the wrinkles; however, the increase in the power of the argon plasma increased the wavelengths and decreased the heights of the wrinkles. Argon molecules are heavier and smaller than nitrogen and oxygen molecules that have similar weights and sizes; moreover, the argon plasma comprises positive ions while the oxygen and nitrogen plasma comprise negative ions. This resulted in differences in the wrinkle features. It was concluded that a combination of different plasma gases could achieve exclusive control over either the wavelength or the height and allow a thorough analysis of the correlation between the wrinkle features and the characteristics of the electronic devices.

Space Potential and Ion Energies in a Low Pressure Discharge Containing at least Two Negative Species

1988 ◽  
Vol 117 ◽  
Author(s):  
S G Ingram ◽  
N St J Braithwaite
Keyword(s):  
Energy Distribution ◽  
Collisionless Plasma ◽  
Negative Ions ◽  
Potential Drop ◽  
Low Pressure ◽  
Type Model ◽  
Plasma Parameters ◽  
Ion Energy ◽  
Ion Energy Distribution ◽  
Positive Ion

AbstractA Tonks-Langmuir type model for a one-dimensional low pressure (collisionless) plasma containing at least two species of Maxwellian negative charge carriers is examined. The solutions of this model yield the positive ion energy distribution at the sheath edge without needing to specify the ionization process. This distribution has a width consistent with the potential drop across the plasma, and is shown to satisfy the generalised Bohm criterion for sheath formation. However by assuming a form for the ionization rate in the plasma, the potential profile across the discharge has been calculated. It has been found that for a range of plasma parameters the solution for the potential at which quasineutrality fails becomes triple valued; the physical solution in this regime is identified.Many plasmas used for materials processing contain negative ions. It is important to understand how these ions influence the positive ion energy distribution at the substrate where the processing occurs.This work is also of relevance to the behaviour of Langmuir probes in electronegative plasmas.

Ion and electron energy distribution in the hydrogen discharge

1967 ◽  
Vol 296 (1445) ◽  
pp. 233-242 ◽  
Keyword(s):  
Energy Distribution ◽  
Electron Energy ◽  
Low Pressure ◽  
Distribution Analysis ◽  
Electron Energy Distribution ◽  
Energy Distributions ◽  
Small Probe ◽  
Positive Ions ◽  
New Information ◽  
Hydrogen Discharge

A small probe which extracts a sample pencil from the distribution of ions and electrons in a low pressure arc has been used to carry out a retardation energy distribution analysis on these particles. Axial and radial variations in these distributions in a striated hydrogen discharge have been studied. The results confirm the findings of Boyd & Twiddy for electrons and supplement their data with new information on the energy distributions of the positive ions. The measurements at the striation tail-head transition are in accord with Langmuir’s double sheath criterion.

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