Dielectric dipole mitigated Schottky barrier height tuning using atomic layer deposited aluminum oxide for contact resistance reduction

2011 ◽  
Vol 99 (10) ◽  
pp. 102108 ◽  
Author(s):  
Brian E. Coss ◽  
Wei-Yip Loh ◽  
Herman Carlo Floresca ◽  
Moon J. Kim ◽  
Prashant Majhi ◽  
...  
Keyword(s):  
Aluminum Oxide ◽  
Contact Resistance ◽  
Schottky Barrier ◽  
Barrier Height ◽  
Schottky Barrier Height ◽  
Atomic Layer ◽  
Resistance Reduction

Contact Resistance Reduction to FinFET Source/Drain Using Novel Dielectric Dipole Schottky Barrier Height Modulation Method

2011 ◽  
Vol 32 (7) ◽  
pp. 862-864 ◽  
Author(s):  
Brian E. Coss ◽  
Casey Smith ◽  
Wei-Yip Loh ◽  
Prashant Majhi ◽  
Robert M. Wallace ◽  
...  
Keyword(s):  
Contact Resistance ◽  
Schottky Barrier ◽  
Barrier Height ◽  
Schottky Barrier Height ◽  
Modulation Method ◽  
Resistance Reduction

Schottky barrier height tuning using P+ DSS for NMOS contact resistance reduction

2012 ◽  
Author(s):  
Fareen Adeni Khaja ◽  
K. V. Rao ◽  
Chi-Nung Ni ◽  
Shankar Muthukrishnan ◽  
Jianxin Lei ◽  
...  
Keyword(s):  
Contact Resistance ◽  
Schottky Barrier ◽  
Barrier Height ◽  
Schottky Barrier Height ◽  
Resistance Reduction

The influence of Fermi level pinning/depinning on the Schottky barrier height and contact resistance in Ge/CoFeB and Ge/MgO/CoFeB structures

2010 ◽  
Vol 96 (5) ◽  
pp. 052514 ◽  
Author(s):  
Donkoun Lee ◽  
Shyam Raghunathan ◽  
Robert J. Wilson ◽  
Dmitri E. Nikonov ◽  
Krishna Saraswat ◽  
...  
Keyword(s):  
Contact Resistance ◽  
Fermi Level ◽  
Schottky Barrier ◽  
Barrier Height ◽  
Schottky Barrier Height ◽  
Fermi Level Pinning
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