A multicomponent, multitemperature model for high density plasma processing reactors

1996 ◽  
Vol 80 (3) ◽  
pp. 1345-1351 ◽  
Author(s):  
M. Meyyappan ◽  
T. R. Govindan
Keyword(s):  
Plasma Processing ◽  
High Density ◽  
Plasma Processing Reactors ◽  
Density Plasma

High density plasma processing of nanostructured diamond films on metals

1998 ◽  
Vol 84 (11) ◽  
pp. 6469-6471 ◽  
Author(s):  
Shane A. Catledge ◽  
Yogesh K. Vohra
Keyword(s):  
Diamond Films ◽  
Plasma Processing ◽  
High Density ◽  
Density Plasma

Hydrogenation effects during high-density plasma processing of GaAs MESFETS

1997 ◽  
Vol 12 (9) ◽  
pp. 1154-1160 ◽  
Author(s):  
F Ren ◽  
J W Lee ◽  
C R Abernathy ◽  
S J Pearton ◽  
R J Shul ◽  
...  
Keyword(s):  
Plasma Processing ◽  
High Density ◽  
Density Plasma

Effects of high-density plasma processing on MOSFET matching, noise, and hot carrier reliability

1999 ◽  
Author(s):  
Sidhartha Sen ◽  
Edward B. Harris ◽  
Richard W. Gregor ◽  
Samuel Martin ◽  
Mahjoub A. Abdelgadir ◽  
...  
Keyword(s):  
Plasma Processing ◽  
High Density ◽  
Hot Carrier ◽  
Density Plasma

High density plasma processing of p-Hg0.7Cd0.3Te

2006 ◽  
Author(s):  
Benjamin Park ◽  
Charles Musca ◽  
Jarek Antoszewski ◽  
John Dell ◽  
Lorenzo Faraone
Keyword(s):  
Plasma Processing ◽  
High Density ◽  
Density Plasma
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