plasma processing reactors Latest Research Papers

Computer-aided Design of Plasma Processing Reactors Final Report CRADA No. TC-0339-92

10.2172/1430933 ◽

2018 ◽

Author(s):

P. Vitello ◽

J. T. Lee ◽

M. Surrendra

Keyword(s):

Computer Aided Design ◽

Plasma Processing ◽

Final Report ◽

Computer Aided ◽

Aided Design ◽

Plasma Processing Reactors

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Multi-variable Feedback Regulation Of Plasma Processing Reactors

Proceedings of 1994 IEEE 21st International Conference on Plasma Sciences (ICOPS) ◽

10.1109/plasma.1994.589125 ◽

2005 ◽

Author(s):

M.A. Firestone

Keyword(s):

Plasma Processing ◽

Feedback Regulation ◽

Plasma Processing Reactors

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Self-consistent three-dimensional model of dust particle transport and formation of Coulomb crystals in plasma processing reactors

Journal of Applied Physics ◽

10.1063/1.1516865 ◽

2002 ◽

Vol 92 (11) ◽

pp. 6451-6460 ◽

Cited By ~ 29

Author(s):

Vivek Vyas ◽

Gregory A. Hebner ◽

Mark J. Kushner

Keyword(s):

Dust Particle ◽

Particle Transport ◽

Three Dimensional ◽

Plasma Processing ◽

Dimensional Model ◽

Three Dimensional Model ◽

Self Consistent ◽

Coulomb Crystals ◽

Plasma Processing Reactors

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Modelling of inductively coupled plasma processing reactors

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/34/18/305 ◽

2001 ◽

Vol 34 (18) ◽

pp. 2742-2747 ◽

Cited By ~ 14

Author(s):

Deepak Bose ◽

David Hash ◽

T R Govindan ◽

M Meyyappan

Keyword(s):

Inductively Coupled Plasma ◽

Plasma Processing ◽

Inductively Coupled ◽

Plasma Processing Reactors

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Controller design issues in the feedback control of radio frequency plasma processing reactors

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.581690 ◽

1999 ◽

Vol 17 (3) ◽

pp. 704-712 ◽

Cited By ~ 11

Author(s):

Shahid Rauf ◽

Mark J. Kushner

Keyword(s):

Feedback Control ◽

Radio Frequency ◽

Controller Design ◽

Plasma Processing ◽

Radio Frequency Plasma ◽

Design Issues ◽

Frequency Plasma ◽

Plasma Processing Reactors

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Nonlinear dynamics of radio frequency plasma processing reactors powered by multifrequency sources

IEEE Transactions on Plasma Science ◽

10.1109/27.799809 ◽

1999 ◽

Vol 27 (5) ◽

pp. 1329-1338 ◽

Cited By ~ 93

Author(s):

S. Rauf ◽

M.J. Kushner

Keyword(s):

Nonlinear Dynamics ◽

Radio Frequency ◽

Plasma Processing ◽

Radio Frequency Plasma ◽

Frequency Plasma ◽

Plasma Processing Reactors

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Consequences of asymmetric pumping in low pressure plasma processing reactors: A three-dimensional modeling study

Journal of Applied Physics ◽

10.1063/1.366297 ◽

1997 ◽

Vol 82 (11) ◽

pp. 5312-5320 ◽

Cited By ~ 30

Author(s):

Mark J. Kushner

Keyword(s):

Three Dimensional ◽

Plasma Processing ◽

Low Pressure ◽

Pressure Plasma ◽

Three Dimensional Modeling ◽

Dimensional Modeling ◽

Low Pressure Plasma ◽

Plasma Processing Reactors ◽

Modeling Study

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A semianalytic radio frequency sheath model integrated into a two-dimensional hybrid model for plasma processing reactors

Journal of Applied Physics ◽

10.1063/1.364199 ◽

1997 ◽

Vol 81 (2) ◽

pp. 569-577 ◽

Cited By ~ 63

Author(s):

Michael J. Grapperhaus ◽

Mark J. Kushner

Keyword(s):

Radio Frequency ◽

Hybrid Model ◽

Plasma Processing ◽

Two Dimensional ◽

Plasma Processing Reactors

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A multicomponent, multitemperature model for high density plasma processing reactors

Journal of Applied Physics ◽

10.1063/1.362933 ◽

1996 ◽

Vol 80 (3) ◽

pp. 1345-1351 ◽

Cited By ~ 24

Author(s):

M. Meyyappan ◽

T. R. Govindan

Keyword(s):

Plasma Processing ◽

High Density ◽

Plasma Processing Reactors ◽

Density Plasma

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Regimes of particle trapping in inductively coupled plasma processing reactors

Applied Physics Letters ◽

10.1063/1.115983 ◽

1996 ◽

Vol 68 (26) ◽

pp. 3716-3718 ◽

Cited By ~ 19

Author(s):

Helen H. Hwang ◽

Mark J. Kushner

Keyword(s):

Inductively Coupled Plasma ◽

Plasma Processing ◽

Particle Trapping ◽

Inductively Coupled ◽

Plasma Processing Reactors

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plasma processing reactors
Recently Published Documents

TOTAL DOCUMENTS

H-INDEX

Computer-aided Design of Plasma Processing Reactors Final Report CRADA No. TC-0339-92

Multi-variable Feedback Regulation Of Plasma Processing Reactors

Self-consistent three-dimensional model of dust particle transport and formation of Coulomb crystals in plasma processing reactors

Modelling of inductively coupled plasma processing reactors

Controller design issues in the feedback control of radio frequency plasma processing reactors

Nonlinear dynamics of radio frequency plasma processing reactors powered by multifrequency sources

Consequences of asymmetric pumping in low pressure plasma processing reactors: A three-dimensional modeling study

A semianalytic radio frequency sheath model integrated into a two-dimensional hybrid model for plasma processing reactors

A multicomponent, multitemperature model for high density plasma processing reactors

Regimes of particle trapping in inductively coupled plasma processing reactors

Export Citation Format

plasma processing reactorsRecently Published Documents

TOTAL DOCUMENTS

H-INDEX

Computer-aided Design of Plasma Processing Reactors Final Report CRADA No. TC-0339-92

Multi-variable Feedback Regulation Of Plasma Processing Reactors

Self-consistent three-dimensional model of dust particle transport and formation of Coulomb crystals in plasma processing reactors

Modelling of inductively coupled plasma processing reactors

Controller design issues in the feedback control of radio frequency plasma processing reactors

Nonlinear dynamics of radio frequency plasma processing reactors powered by multifrequency sources

Consequences of asymmetric pumping in low pressure plasma processing reactors: A three-dimensional modeling study

A semianalytic radio frequency sheath model integrated into a two-dimensional hybrid model for plasma processing reactors

A multicomponent, multitemperature model for high density plasma processing reactors

Regimes of particle trapping in inductively coupled plasma processing reactors

plasma processing reactors
Recently Published Documents