Radio‐frequency plasmas in CF4: Self‐consistent modeling of the plasma physics and chemistry
2003 ◽
Vol 21
(11)
◽
pp. 2133-2145
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1989 ◽
Vol 22
(2)
◽
pp. 361-363
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Keyword(s):
1998 ◽
Vol 16
(3)
◽
pp. 1201-1206
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