Self-consistent particle simulation of radio-frequency CF4 discharge with implementation of all ion–neutral reactive collisions

1998 ◽  
Vol 16 (3) ◽  
pp. 1201-1206 ◽  
Author(s):  
Kazuki Denpoh ◽  
Kenichi Nanbu
1997 ◽  
Vol 82 (5) ◽  
pp. 2060-2071 ◽  
Author(s):  
G. J. Nienhuis ◽  
W. J. Goedheer ◽  
E. A. G. Hamers ◽  
W. G. J. H. M. van Sark ◽  
J. Bezemer

2014 ◽  
Vol 21 (6) ◽  
pp. 061509 ◽  
Author(s):  
Jonathan Jacquot ◽  
Daniele Milanesio ◽  
Laurent Colas ◽  
Yann Corre ◽  
Marc Goniche ◽  
...  

2010 ◽  
Vol 81 (2) ◽  
pp. 02B726 ◽  
Author(s):  
J. Tamura ◽  
T. Hattori ◽  
N. Hayashizaki ◽  
T. Ishibashi ◽  
T. Kanesue ◽  
...  

2014 ◽  
Author(s):  
Jonathan Jacquot ◽  
Daniele Milanesio ◽  
Laurent Colas ◽  
Yann Corre ◽  
Marc Goniche ◽  
...  

2010 ◽  
Vol 115 (A12) ◽  
pp. n/a-n/a ◽  
Author(s):  
Mitsuru Hikishima ◽  
Yoshiharu Omura ◽  
Danny Summers

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