Self-consistent particle simulation of radio-frequency CF4 discharge with implementation of all ion–neutral reactive collisions
1998 ◽
Vol 16
(3)
◽
pp. 1201-1206
◽
2000 ◽
Vol 39
(Part 1, No. 5A)
◽
pp. 2804-2808
◽
2010 ◽
Vol 81
(2)
◽
pp. 02B726
◽
1989 ◽
Vol 36
(5)
◽
pp. 846-853
◽
2010 ◽
Vol 115
(A12)
◽
pp. n/a-n/a
◽