Interfacial reactions in ultrahigh vacuum deposited Y‐Si multilayer thin films

1994 ◽  
Vol 75 (4) ◽  
pp. 2007-2014 ◽  
Author(s):  
T. L. Lee ◽  
L. J. Chen
Keyword(s):  
Thin Films ◽  
Ultrahigh Vacuum ◽  
Interfacial Reactions ◽  
Multilayer Thin Films

Simultaneous Occurrence of Multiphases in the Interfacial Reactions of Ultrahigh Vacuum Deposited Ti, Hf and Cr Thin Films on (111)Si

1993 ◽  
Vol 311 ◽  
Author(s):  
W.W. Hsieh ◽  
J.J. Lin ◽  
M.M. Wang ◽  
L.L. Chen
Keyword(s):  
Thin Film ◽  
Electron Microscopy ◽  
Thin Films ◽  
Ultrahigh Vacuum ◽  
Interfacial Reactions ◽  
Simultaneous Occurrence ◽  
Image Simulation ◽  
Reaction Sequence ◽  
Transmission Electron ◽  
Amorphous Interlayer

ABSTRACTSimultaneous occurrence of multiphases was observed in the interfacial reactions of ultrahigh vacuum deposited Ti, Hf and Cr thin films on (111)Si by high resolution transmission electron microscopy in conjunction with fast Fourier transform diffraction analysis and image simulation. For the three systems, an amorphous interlayer as well as a number of crystalline phase were found to form simultaneously in the early stages of interfacial reactions. The formation of multiphases appeared to be quite general in the initial stages of interfacial reactions of UHV deposited refractory thin films. The results called for a reexamination of generally accepted “difference” in reaction sequence between bulk and thin film couples.

Interfacial reactions on annealing Cu/Al multilayer thin films

1993 ◽  
Vol 74 (10) ◽  
pp. 6165-6169 ◽  
Author(s):  
H. G. Jiang ◽  
J. Y. Dai ◽  
H. Y. Tong ◽  
B. Z. Ding ◽  
Q. H. Song ◽  
...  
Keyword(s):  
Thin Films ◽  
Interfacial Reactions ◽  
Multilayer Thin Films

Interfacial reactions in single-crystal-TiN (100)/Al/polycrystalline-TiN multilayer thin films

1992 ◽  
Vol 215 (2) ◽  
pp. 152-161 ◽  
Author(s):  
L. Hultman ◽  
S. Benhenda ◽  
G. Radnoczi ◽  
J.-E. Sundgren ◽  
J.E. Greene ◽  
...  
Keyword(s):  
Thin Films ◽  
Single Crystal ◽  
Interfacial Reactions ◽  
Multilayer Thin Films
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