scholarly journals Scaling laws for diamond chemical‐vapor deposition. II. Atomic hydrogen transport

1993 ◽  
Vol 74 (11) ◽  
pp. 6895-6906 ◽  
Author(s):  
D. G. Goodwin
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Atomic Hydrogen ◽  
Scaling Laws ◽  
Chemical Vapor ◽  
Hydrogen Transport ◽  
Diamond Chemical Vapor Deposition

scholarly journals Atomic hydrogen concentration profiles at filaments used for chemical vapor deposition of diamond

1991 ◽  
Vol 58 (6) ◽  
pp. 571-573 ◽  
Author(s):  
L. Schäfer ◽  
C.‐P. Klages ◽  
U. Meier ◽  
K. Kohse‐Höinghaus
Keyword(s):  
Chemical Vapor Deposition ◽  
Hydrogen Concentration ◽  
Vapor Deposition ◽  
Atomic Hydrogen ◽  
Chemical Vapor ◽  
Concentration Profiles

Ion-to-CH3 flux ratio in diamond chemical-vapor deposition

2002 ◽  
Vol 92 (7) ◽  
pp. 4103-4108 ◽  
Author(s):  
Kungen Teii ◽  
Masaru Hori ◽  
Toshio Goto
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Flux Ratio ◽  
Chemical Vapor ◽  
Diamond Chemical Vapor Deposition
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