Monte Carlo simulation of electron behavior in an electron cyclotron resonance discharge

S. C. Kuo; E. E. Kunhardt; S. P. Kuo

doi:10.1063/1.352824

Monte Carlo simulation of electron behavior in an electron cyclotron resonance discharge

Journal of Applied Physics ◽

10.1063/1.352824 ◽

1993 ◽

Vol 73 (9) ◽

pp. 4197-4204 ◽

Cited By ~ 11

Author(s):

S. C. Kuo ◽

E. E. Kunhardt ◽

S. P. Kuo

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron

Download Full-text

Monte Carlo simulation of electron behavior in an electron cyclotron resonance microwave discharge sustained by circular TM11mode fields

Journal of Applied Physics ◽

10.1063/1.363033 ◽

1996 ◽

Vol 80 (4) ◽

pp. 2512-2514 ◽

Cited By ~ 2

Author(s):

S. C. Kuo ◽

S. P. Kuo

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Microwave Discharge ◽

Electron Cyclotron ◽

Resonance Microwave

Download Full-text

Monte Carlo simulation and experimental study of an electron cyclotron resonance plasma for thin film deposition

IEEE Conference Record - Abstracts. 1997 IEEE International Conference on Plasma Science ◽

10.1109/plasma.1997.604953 ◽

2002 ◽

Author(s):

E. Koretzky ◽

S.P. Kuo ◽

S.C. Kuo

Keyword(s):

Thin Film ◽

Experimental Study ◽

Monte Carlo Simulation ◽

Monte Carlo ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Thin Film Deposition ◽

Electron Cyclotron ◽

Film Deposition ◽

Resonance Plasma

Download Full-text

Comparison of circular TM/sub 01/ and TM/sub 11/ modes generated electron cyclotron resonance microwave discharges-a Monte Carlo simulation study

ICOPS 2000. IEEE Conference Record - Abstracts. 27th IEEE International Conference on Plasma Science (Cat. No.00CH37087) ◽

10.1109/plasma.2000.854836 ◽

2002 ◽

Author(s):

S.S. Kuo

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Simulation Study ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Monte Carlo Simulation Study ◽

Microwave Discharges ◽

Resonance Microwave

Download Full-text

Monte Carlo simulation and experimental study of an electron cyclotron resonance plasma for thin film deposition

IEEE Conference Record - Abstracts. 1996 IEEE International Conference on Plasma Science ◽

10.1109/plasma.1996.550637 ◽

2002 ◽

Author(s):

E. Koretzky ◽

S.P. Kuo ◽

S.C. Kuo

Keyword(s):

Thin Film ◽

Experimental Study ◽

Monte Carlo Simulation ◽

Monte Carlo ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Thin Film Deposition ◽

Electron Cyclotron ◽

Film Deposition ◽

Resonance Plasma

Download Full-text

Monte Carlo simulation of electron behavior in an electron cyclotron resonance microwave discharge

International Conference on Plasma Sciences (ICOPS) ◽

10.1109/plasma.1993.593406 ◽

1993 ◽

Author(s):

S.C. Kuo ◽

E.E. Kunhardt ◽

S.P. Kuo

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Microwave Discharge ◽

Electron Cyclotron ◽

Resonance Microwave

Download Full-text

Monte Carlo simulations of argon ion transport in the downstream region of electron cyclotron resonance plasmas

Journal of Applied Physics ◽

10.1063/1.367323 ◽

1998 ◽

Vol 83 (10) ◽

pp. 5069-5074 ◽

Cited By ~ 7

Author(s):

X. X. Zhong ◽

J. D. Wu ◽

C. Z. Wu ◽

F. M. Li

Keyword(s):

Monte Carlo ◽

Monte Carlo Simulations ◽

Ion Transport ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Downstream Region ◽

Argon Ion

Download Full-text

The particle-in-cell simulation and Monte Carlo collision simulation of the interaction between electrons and microwave in electron cyclotron resonance discharge

Acta Physica Sinica ◽

10.7498/aps.58.5526 ◽

2009 ◽

Vol 58 (8) ◽

pp. 5526

Author(s):

Jin Xiao-Lin ◽

Huang Tao ◽

Liao Ping ◽

Yang Zhong-Hai

Keyword(s):

Monte Carlo ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Particle In Cell ◽

Cell Simulation

Download Full-text

A 3D Monte Carlo code for the modeling of plasma dynamics and beam formation mechanism in electron cyclotron resonance ion sources

Review of Scientific Instruments ◽

10.1063/1.3670341 ◽

2012 ◽

Vol 83 (2) ◽

pp. 02A330 ◽

Cited By ~ 8

Author(s):

L. Neri ◽

D. Mascali ◽

L. Celona ◽

S. Gammino ◽

G. Ciavola

Keyword(s):

Monte Carlo ◽

Formation Mechanism ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Ion Sources ◽

Monte Carlo Code ◽

Plasma Dynamics ◽

Beam Formation ◽

3D Monte Carlo

Download Full-text

Monte Carlo model of charge-state distributions for electron cyclotron resonance ion source plasmas

Proceedings of the 1999 Particle Accelerator Conference (Cat. No.99CH36366) ◽

10.1109/pac.1999.794294 ◽

2003 ◽

Author(s):

D.H. Edgell ◽

J.S. Kim ◽

S.K. Wong ◽

R.C. Pardo ◽

R. Vondrasek

Keyword(s):

Monte Carlo ◽

Charge State ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Monte Carlo Model ◽

Ion Source ◽

Electron Cyclotron ◽

Charge State Distributions

Download Full-text

CALIBRATION OF HIGH MAGNETIC FIELDS USING FREE ELECTRON CYCLOTRON RESONANCE IN A PLASMA

Le Journal de Physique Colloques ◽

10.1051/jphyscol:19841196 ◽

1984 ◽

Vol 45 (C1) ◽

pp. C1-961-C1-963

Author(s):

J. C. Maan ◽

H.-J. Schneider Muntau ◽

A. Dorelon

Keyword(s):

Magnetic Fields ◽

Free Electron ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

High Magnetic Fields

Download Full-text