Separate control of the ion flux and ion energy in capacitively coupled radio-frequency discharges using voltage waveform tailoring

T. Lafleur; P. A. Delattre; E. V. Johnson; J. P. Booth

doi:10.1063/1.4754692

Separate control of the ion flux and ion energy in capacitively coupled radio-frequency discharges using voltage waveform tailoring

Applied Physics Letters ◽

10.1063/1.4754692 ◽

2012 ◽

Vol 101 (12) ◽

pp. 124104 ◽

Cited By ~ 60

Author(s):

T. Lafleur ◽

P. A. Delattre ◽

E. V. Johnson ◽

J. P. Booth

Keyword(s):

Radio Frequency ◽

Ion Flux ◽

Voltage Waveform ◽

Ion Energy ◽

Capacitively Coupled ◽

Separate Control ◽

Radio Frequency Discharges

Download Full-text

The electrical asymmetry effect in capacitively coupled radio frequency discharges – measurements of dc self bias, ion energy and ion flux

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/42/9/092005 ◽

2009 ◽

Vol 42 (9) ◽

pp. 092005 ◽

Cited By ~ 110

Author(s):

J Schulze ◽

E Schüngel ◽

U Czarnetzki

Keyword(s):

Radio Frequency ◽

Ion Flux ◽

Ion Energy ◽

Asymmetry Effect ◽

Capacitively Coupled ◽

Self Bias ◽

Radio Frequency Discharges

Download Full-text

The effect of secondary electrons on the separate control of ion energy and flux in dual-frequency capacitively coupled radio frequency discharges

Applied Physics Letters ◽

10.1063/1.3481427 ◽

2010 ◽

Vol 97 (8) ◽

pp. 081501 ◽

Cited By ~ 66

Author(s):

Z. Donkó ◽

J. Schulze ◽

P. Hartmann ◽

I. Korolov ◽

U. Czarnetzki ◽

...

Keyword(s):

Radio Frequency ◽

Dual Frequency ◽

Secondary Electrons ◽

Ion Energy ◽

Capacitively Coupled ◽

Separate Control ◽

Radio Frequency Discharges

Download Full-text

Customized ion flux-energy distribution functions in capacitively coupled plasmas by voltage waveform tailoring

Plasma Sources Science and Technology ◽

10.1088/0963-0252/24/4/045013 ◽

2015 ◽

Vol 24 (4) ◽

pp. 045013 ◽

Cited By ~ 5

Author(s):

E Schüngel ◽

Z Donkó ◽

P Hartmann ◽

A Derzsi ◽

I Korolov ◽

...

Keyword(s):

Energy Distribution ◽

Distribution Functions ◽

Ion Flux ◽

Voltage Waveform ◽

Capacitively Coupled ◽

Coupled Plasmas ◽

Energy Distribution Functions ◽

Flux Energy

Download Full-text

Effect of electrode material on measured ion energy distributions in radio‐frequency discharges

Applied Physics Letters ◽

10.1063/1.114540 ◽

1995 ◽

Vol 67 (4) ◽

pp. 473-475 ◽

Cited By ~ 18

Author(s):

J. K. Olthoff ◽

R. J. Van Brunt ◽

S. B. Radovanov

Keyword(s):

Radio Frequency ◽

Electrode Material ◽

Energy Distributions ◽

Ion Energy ◽

Radio Frequency Discharges ◽

Ion Energy Distributions

Download Full-text

Optimization of the electrical asymmetry effect in dual-frequency capacitively coupled radio frequency discharges: Experiment, simulation, and model

Journal of Applied Physics ◽

10.1063/1.3223310 ◽

2009 ◽

Vol 106 (6) ◽

pp. 063307 ◽

Cited By ~ 59

Author(s):

J. Schulze ◽

E. Schüngel ◽

U. Czarnetzki ◽

Z. Donkó

Keyword(s):

Radio Frequency ◽

Dual Frequency ◽

Asymmetry Effect ◽

Capacitively Coupled ◽

Radio Frequency Discharges

Download Full-text

Disparity between current and voltage driven capacitively coupled radio frequency discharges

Plasma Sources Science and Technology ◽

10.1088/1361-6595/aae5c1 ◽

2018 ◽

Vol 27 (12) ◽

pp. 125010 ◽

Cited By ~ 10

Author(s):

S Wilczek ◽

J Trieschmann ◽

J Schulze ◽

Z Donkó ◽

R P Brinkmann ◽

...

Keyword(s):

Radio Frequency ◽

Capacitively Coupled ◽

Radio Frequency Discharges

Download Full-text

The magnetic asymmetry effect in geometrically asymmetric capacitively coupled radio frequency discharges operated in Ar/O2

Plasma Sources Science and Technology ◽

10.1088/1361-6595/ab9b31 ◽

2020 ◽

Vol 29 (7) ◽

pp. 075013

Author(s):

M Oberberg ◽

B Berger ◽

M Buschheuer ◽

D Engel ◽

C Wölfel ◽

...

Keyword(s):

Radio Frequency ◽

Asymmetry Effect ◽

Capacitively Coupled ◽

Radio Frequency Discharges ◽

Magnetic Asymmetry

Download Full-text

N2–H2 capacitively coupled radio-frequency discharges at low pressure. Part I. Experimental results: effect of the H2 amount on electrons, positive ions and ammonia formation

Plasma Sources Science and Technology ◽

10.1088/1361-6595/ab9b1a ◽

2020 ◽

Vol 29 (8) ◽

pp. 085019 ◽

Cited By ~ 1

Author(s):

Audrey Chatain ◽

Miguel Jiménez-Redondo ◽

Ludovic Vettier ◽

Olivier Guaitella ◽

Nathalie Carrasco ◽

...

Keyword(s):

Radio Frequency ◽

Low Pressure ◽

Experimental Results ◽

Capacitively Coupled ◽

Positive Ions ◽

Radio Frequency Discharges ◽

Pressure Part ◽

Ammonia Formation

Download Full-text

A hybrid, one-dimensional model of capacitively coupled radio-frequency discharges

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/41/22/225208 ◽

2008 ◽

Vol 41 (22) ◽

pp. 225208 ◽

Cited By ~ 16

Author(s):

Brian G Heil ◽

Ralf Peter Brinkmann ◽

Uwe Czarnetzki

Keyword(s):

Radio Frequency ◽

Dimensional Model ◽

Capacitively Coupled ◽

One Dimensional ◽

Radio Frequency Discharges

Download Full-text

Ion energy distributions in inductively coupled radio-frequency discharges in argon, nitrogen, oxygen, chlorine, and their mixtures

Journal of Applied Physics ◽

10.1063/1.370138 ◽

1999 ◽

Vol 85 (9) ◽

pp. 6358-6365 ◽

Cited By ~ 54

Author(s):

Yicheng Wang ◽

J. K. Olthoff

Keyword(s):

Radio Frequency ◽

Energy Distributions ◽

Ion Energy ◽

Inductively Coupled ◽

Radio Frequency Discharges ◽

Ion Energy Distributions

Download Full-text