Evaluation of crystalline quality of heteroepitaxial yttria‐stabilized zirconia films on silicon by means of ion beam channeling

Hirofumi Fukumoto; Takeshi Imura; Yukio Osaka; Fumitaka Nishiyama

doi:10.1063/1.344457

Evaluation of crystalline quality of heteroepitaxial yttria‐stabilized zirconia films on silicon by means of ion beam channeling

Journal of Applied Physics ◽

10.1063/1.344457 ◽

1989 ◽

Vol 66 (2) ◽

pp. 616-618 ◽

Cited By ~ 12

Author(s):

Hirofumi Fukumoto ◽

Takeshi Imura ◽

Yukio Osaka ◽

Fumitaka Nishiyama

Keyword(s):

Ion Beam ◽

Yttria Stabilized Zirconia ◽

Crystalline Quality ◽

Stabilized Zirconia ◽

Zirconia Films

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Study on the growth of biaxially aligned yttria-stabilized zirconia films during ion beam assisted deposition

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.580943 ◽

1997 ◽

Vol 15 (5) ◽

pp. 2687-2692 ◽

Cited By ~ 6

Author(s):

Y. J. Mao ◽

C. X. Ren ◽

J. Yuan ◽

F. Zhang ◽

X. H. Liu ◽

...

Keyword(s):

Ion Beam ◽

Yttria Stabilized Zirconia ◽

Stabilized Zirconia ◽

Ion Beam Assisted Deposition ◽

Zirconia Films

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An empirical growth model for the biaxially aligned yttria stabilized zirconia films deposited by ion beam assisted deposition

Thin Solid Films ◽

10.1016/s0040-6090(03)00458-9 ◽

2003 ◽

Vol 434 (1-2) ◽

pp. 82-85 ◽

Cited By ~ 4

Author(s):

S. Gnanarajan

Keyword(s):

Growth Model ◽

Ion Beam ◽

Yttria Stabilized Zirconia ◽

Stabilized Zirconia ◽

Ion Beam Assisted Deposition ◽

Empirical Growth ◽

Zirconia Films

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The development of biaxial alignment in yttria-stabilized zirconia films fabricated by ion beam assisted deposition

Journal of Electronic Materials ◽

10.1007/bf02666171 ◽

1996 ◽

Vol 25 (1) ◽

pp. 35-42 ◽

Cited By ~ 14

Author(s):

Kevin G. Ressler ◽

Neville Sonnenberg ◽

Michael J. Cima

Keyword(s):

Ion Beam ◽

Yttria Stabilized Zirconia ◽

Stabilized Zirconia ◽

Ion Beam Assisted Deposition ◽

Biaxial Alignment ◽

Zirconia Films

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Low energy ion beam assisted deposition of biaxially aligned yttria stabilized zirconia films on polycrystalline Ni–Cr alloy

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/s0168-583x(97)00655-1 ◽

1998 ◽

Vol 135 (1-4) ◽

pp. 492-500 ◽

Cited By ~ 5

Author(s):

Y.J Mao ◽

B.Y Jiang ◽

C.X Ren ◽

X.H Liu ◽

S.C Zou

Keyword(s):

Ion Beam ◽

Low Energy ◽

Yttria Stabilized Zirconia ◽

Stabilized Zirconia ◽

Ion Beam Assisted Deposition ◽

Zirconia Films

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Improving crystalline quality of polycrystalline silicon thin films crystallized on yttria-stabilized zirconia crystallization-induction layers by the two-step irradiation method of pulsed laser annealing

Japanese Journal of Applied Physics ◽

10.7567/jjap.54.03ca01 ◽

2015 ◽

Vol 54 (3S) ◽

pp. 03CA01 ◽

Cited By ~ 1

Author(s):

Mai Thi Kieu Lien ◽

Susumu Horita

Keyword(s):

Thin Films ◽

Polycrystalline Silicon ◽

Laser Annealing ◽

Pulsed Laser ◽

Yttria Stabilized Zirconia ◽

Crystalline Quality ◽

Stabilized Zirconia ◽

Silicon Thin Films ◽

Pulsed Laser Annealing

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Enhancement of the crystalline quality of reactively sputtered yttria-stabilized zirconia by oxidation of the metallic target surface

Thin Solid Films ◽

10.1016/j.tsf.2009.03.035 ◽

2009 ◽

Vol 517 (20) ◽

pp. 5830-5836 ◽

Cited By ~ 7

Author(s):

Sukreen Hana ◽

Kensuke Nishioka ◽

Susumu Horita

Keyword(s):

Target Surface ◽

Yttria Stabilized Zirconia ◽

Crystalline Quality ◽

Stabilized Zirconia ◽

Metallic Target

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In-plane texture study of the yttria-stabilized zirconia films fabricated by ion-beam-assisted deposition

Proceedings of 11th International Conference on Ion Implantation Technology ◽

10.1109/iit.1996.586533 ◽

2002 ◽

Author(s):

Jun Yuan ◽

Genqing Yang ◽

Yingjun Mao ◽

Xingcong Ren ◽

Xianghuai Liu ◽

...

Keyword(s):

Ion Beam ◽

Yttria Stabilized Zirconia ◽

Stabilized Zirconia ◽

Ion Beam Assisted Deposition ◽

Zirconia Films

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Epitaxial growth of yttria‐stabilized zirconia films on silicon by ultrahigh vacuum ion beam sputter deposition

Applied Physics Letters ◽

10.1063/1.100431 ◽

1988 ◽

Vol 53 (16) ◽

pp. 1506-1508 ◽

Cited By ~ 56

Author(s):

P. Legagneux ◽

G. Garry ◽

D. Dieumegard ◽

C. Schwebel ◽

C. Pellet ◽

...

Keyword(s):

Epitaxial Growth ◽

Ion Beam ◽

Ultrahigh Vacuum ◽

Sputter Deposition ◽

Yttria Stabilized Zirconia ◽

Stabilized Zirconia ◽

Ion Beam Sputter Deposition ◽

Zirconia Films

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Channel and temperature effect on the growth of yttria-stabilized zirconia films fabricated by ion-beam-assisted deposition

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/s0168-583x(97)00017-7 ◽

1997 ◽

Vol 127-128 ◽

pp. 837-840 ◽

Cited By ~ 1

Author(s):

Jun Yuan ◽

Genqing Yang ◽

Congxin Ren ◽

Xianghuai Liu ◽

Shichang Zou

Keyword(s):

Temperature Effect ◽

Ion Beam ◽

Yttria Stabilized Zirconia ◽

Stabilized Zirconia ◽

Ion Beam Assisted Deposition ◽

Zirconia Films

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Improvement of the crystalline quality of an yttria-stabilized zirconia film on silicon by a new deposition process in reactive sputtering

Thin Solid Films ◽

10.1016/0040-6090(93)90402-b ◽

1993 ◽

Vol 229 (1) ◽

pp. 17-23 ◽

Cited By ~ 25

Author(s):

Susumu Horita ◽

Toshiyuki Tajima ◽

Masakazu Murakawa ◽

Takaharu Fujiyama ◽

Tomonobu Hata

Keyword(s):

Reactive Sputtering ◽

Deposition Process ◽

Yttria Stabilized Zirconia ◽

Crystalline Quality ◽

Stabilized Zirconia ◽

Zirconia Film

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