Photochemical vapor deposition of amorphous silica films using disilane and perfluorosilanes: Defect structures and deposition mechanism

1988 ◽  
Vol 64 (8) ◽  
pp. 4168-4174 ◽  
Author(s):  
Hidehiko Nonaka ◽  
Kazuo Arai ◽  
Yoshiyuki Fujino ◽  
Shingo Ichimura
Keyword(s):  
Amorphous Silica ◽  
Vapor Deposition ◽  
Defect Structures ◽  
Silica Films ◽  
Deposition Mechanism ◽  
Photochemical Vapor Deposition

Defects and Their Control in SiO2 Films Prepared by D2 –Lamp Photochemical Vapor Deposition

1988 ◽  
Vol 131 ◽  
Author(s):  
Hidehiko Nonaka ◽  
Kazuo Arai ◽  
Shingo Ichimura
Keyword(s):  
Vapor Deposition ◽  
Defect Formation ◽  
Film Growth ◽  
Film Surface ◽  
Formation Mechanisms ◽  
Silica Films ◽  
Activated Oxygen ◽  
Surface Modified ◽  
Photochemical Vapor Deposition ◽  
Vacuum Uv

ABSTRACTAmorphous silica films deposited from the mixture of gases (Si2 H6 and Si2F6) by deutrium-lamp CVD were studied by IR, vacuum UV, EPR and Auger electron (AE) spectrometries. The F-doping enhanced the film growth and removed defects in the film such as -H, -OH, and E' centers. A model on deposition and defect formation mechanisms was proposed based on the thermodynamic Stabilities of resultant HF in the reactions. The AES study showed that the film surface modified by activated oxygen had an increased hardness against electron beams.

Preparation and properties of microcrystalline silicon films using photochemical vapor deposition

1983 ◽  
Vol 59-60 ◽  
pp. 715-718 ◽  
Author(s):  
Tadashi Saitoh ◽  
Toshikazu Shimada ◽  
Masataka Migitaka ◽  
Yasuo Tarui
Keyword(s):  
Vapor Deposition ◽  
Silicon Films ◽  
Microcrystalline Silicon ◽  
Photochemical Vapor Deposition

Photochemical vapor deposition of titaniumdiboride

1990 ◽  
Vol 46 (1-4) ◽  
pp. 215-219 ◽  
Author(s):  
J. Elders ◽  
D. Bebelaar ◽  
J.D.W. van Voorst
Keyword(s):  
Vapor Deposition ◽  
Photochemical Vapor Deposition

Epitaxial growth of Ge films on GaAs (285–415 °C) by laser photochemical vapor deposition

1988 ◽  
Vol 52 (20) ◽  
pp. 1710-1712 ◽  
Author(s):  
V. Tavitian ◽  
C. J. Kiely ◽  
D. B. Geohegan ◽  
J. G. Eden
Keyword(s):  
Epitaxial Growth ◽  
Vapor Deposition ◽  
Photochemical Vapor Deposition
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