An experimental study of a parallel‐plate radio‐frequency discharge: Measurements of the radiation temperature and electron density

1988 ◽  
Vol 63 (7) ◽  
pp. 2226-2236 ◽  
Author(s):  
G. A. Hebner ◽  
J. T. Verdeyen ◽  
M. J. Kushner
Keyword(s):  
Experimental Study ◽  
Radio Frequency ◽  
Electron Density ◽  
Parallel Plate ◽  
Radiation Temperature ◽  
Radio Frequency Discharge ◽  
Discharge Measurements

Die Druckverbreiterung der Balmer-Linien und der diffusen Linien des Heliums

1964 ◽  
Vol 19 (7-8) ◽  
pp. 947-967
Author(s):  
Carl-Rudolf Vidal
Keyword(s):  
Radio Frequency ◽  
Electron Density ◽  
Coulomb Interaction ◽  
High Accuracy ◽  
Line Profiles ◽  
Electron Densities ◽  
Sufficient Energy ◽  
Balmer Lines ◽  
Radio Frequency Discharge ◽  
Better Than

By means of a stationary radio frequency discharge producing homogeneous plasmas of hydrogen (Ne =1,4 ·1013 cm -3, Te = 1850 °K) and helium (Ne = 2,7·1013 cm-3, Te = 1850°K) , line profiles are measured photoelectrically with high accuracy. With sufficient energy, differences in intensity of more than 3 decades can be recorded. Profiles calculated on the basis of a quasistatic theory taking into account the mutual COULOMB interaction of the particles agree better than 5% with the measured, exclusively pressure broadened, BALMER lines, H8 to H15 . The electron densities determined from the H10 to H14 line differ by not more than 1%.Line profiles of the diffuse series of helium, including the “forbidden” components, have been measured. It turns out that the intensity in the wing of the triplett lines is proportional to Δv-2,5 and in the wing of the first singulett lines is proportional to Δν –2.0. The profiles of the triplett lines have been used to determine the electron density. These densities agree with those obtained from the merging of the last decernable lines.

Efficiency of Parallel-Plate Capacitive Radio Frequency Discharge Plasma

2002 ◽  
Vol 41 (Part 1, No. 7A) ◽  
pp. 4729-4730 ◽  
Author(s):  
Hideki Ikegaki ◽  
Shinjiro Tajima ◽  
Masao Endo ◽  
Hiroshi Amemiya
Keyword(s):  
Radio Frequency ◽  
Parallel Plate ◽  
Discharge Plasma ◽  
Radio Frequency Discharge

Plasma sheath electric field strengths above a grooved electrode in a parallel-plate radio-frequency discharge

1999 ◽  
Vol 27 (1) ◽  
pp. 70-71 ◽  
Author(s):  
U. Czarnetzki ◽  
G.A. Hebner ◽  
D. Luggenholscher ◽  
H.F. Dobele ◽  
M.E. Riley
Keyword(s):  
Electric Field ◽  
Radio Frequency ◽  
Parallel Plate ◽  
Plasma Sheath ◽  
Radio Frequency Discharge ◽  
Field Strengths
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