Negative ion-containing plasma in parallel-plate radio-frequency discharge in oxygen

H. Amemiva; N. Yasuda; M. Endou

doi:10.1007/bf01447079

Negative ion-containing plasma in parallel-plate radio-frequency discharge in oxygen

Plasma Chemistry and Plasma Processing ◽

10.1007/bf01447079 ◽

1994 ◽

Vol 14 (3) ◽

pp. 209-227 ◽

Cited By ~ 19

Author(s):

H. Amemiva ◽

N. Yasuda ◽

M. Endou

Keyword(s):

Radio Frequency ◽

Parallel Plate ◽

Negative Ion ◽

Radio Frequency Discharge

Download Full-text

Nonequilibrium dissociation of hydrogen in a parallel-plate radio frequency discharge

Chemical Physics ◽

10.1016/s0301-0104(98)00357-7 ◽

1998 ◽

Vol 238 (3) ◽

pp. 445-453 ◽

Cited By ~ 26

Author(s):

S. Longo ◽

I.D. Boyd

Keyword(s):

Radio Frequency ◽

Parallel Plate ◽

Nonequilibrium Dissociation ◽

Radio Frequency Discharge

Download Full-text

Doppler-broadened line shapes of atomic hydrogen in a parallel-plate radio frequency discharge

Plasma Chemistry and Plasma Processing ◽

10.1007/bf00566007 ◽

1985 ◽

Vol 5 (4) ◽

pp. 317-331 ◽

Cited By ~ 50

Author(s):

Anthony L. Cappelli ◽

Richard A. Gottscho ◽

Terry A. Miller

Keyword(s):

Radio Frequency ◽

Atomic Hydrogen ◽

Parallel Plate ◽

Line Shapes ◽

Radio Frequency Discharge

Download Full-text

Efficiency of Parallel-Plate Capacitive Radio Frequency Discharge Plasma

Japanese Journal of Applied Physics ◽

10.1143/jjap.41.4729 ◽

2002 ◽

Vol 41 (Part 1, No. 7A) ◽

pp. 4729-4730 ◽

Cited By ~ 2

Author(s):

Hideki Ikegaki ◽

Shinjiro Tajima ◽

Masao Endo ◽

Hiroshi Amemiya

Keyword(s):

Radio Frequency ◽

Parallel Plate ◽

Discharge Plasma ◽

Radio Frequency Discharge

Download Full-text

Self-Consistent Modeling of the Effect of Wall-Neutral Reactions on Parallel Plate Radio Frequency Discharge Plasma in Pure Hydrogen

IEEE Transactions on Plasma Science ◽

10.1109/tps.2007.901899 ◽

2007 ◽

Vol 35 (5) ◽

pp. 1241-1246 ◽

Cited By ~ 8

Author(s):

Paola Diomede ◽

Khaled Hassouni ◽

Savino Longo ◽

Mario Capitelli

Keyword(s):

Radio Frequency ◽

Parallel Plate ◽

Discharge Plasma ◽

Pure Hydrogen ◽

Self Consistent ◽

Radio Frequency Discharge

Download Full-text

Vibrational excitation and negative ion production in radio frequency parallel plate H2 plasmas

The European Physical Journal D ◽

10.1140/epjd/e2005-00037-5 ◽

2005 ◽

Vol 33 (2) ◽

pp. 243-251 ◽

Cited By ~ 27

Author(s):

P. Diomede ◽

S. Longo ◽

M. Capitelli

Keyword(s):

Radio Frequency ◽

Parallel Plate ◽

Vibrational Excitation ◽

Negative Ion ◽

Ion Production

Download Full-text

Characterization of an asymmetric parallel plate radio-frequency discharge using a retarding field energy analyzer

Plasma Sources Science and Technology ◽

10.1088/0963-0252/21/1/015002 ◽

2011 ◽

Vol 21 (1) ◽

pp. 015002 ◽

Cited By ~ 21

Author(s):

D Gahan ◽

S Daniels ◽

C Hayden ◽

D O' Sullivan ◽

M B Hopkins

Keyword(s):

Radio Frequency ◽

Parallel Plate ◽

Field Energy ◽

Energy Analyzer ◽

Radio Frequency Discharge

Download Full-text

An experimental study of a parallel‐plate radio‐frequency discharge: Measurements of the radiation temperature and electron density

Journal of Applied Physics ◽

10.1063/1.341060 ◽

1988 ◽

Vol 63 (7) ◽

pp. 2226-2236 ◽

Cited By ~ 40

Author(s):

G. A. Hebner ◽

J. T. Verdeyen ◽

M. J. Kushner

Keyword(s):

Experimental Study ◽

Radio Frequency ◽

Electron Density ◽

Parallel Plate ◽

Radiation Temperature ◽

Radio Frequency Discharge ◽

Discharge Measurements

Download Full-text

Plasma sheath electric field strengths above a grooved electrode in a parallel-plate radio-frequency discharge

IEEE Transactions on Plasma Science ◽

10.1109/27.763042 ◽

1999 ◽

Vol 27 (1) ◽

pp. 70-71 ◽

Cited By ~ 24

Author(s):

U. Czarnetzki ◽

G.A. Hebner ◽

D. Luggenholscher ◽

H.F. Dobele ◽

M.E. Riley

Keyword(s):

Electric Field ◽

Radio Frequency ◽

Parallel Plate ◽

Plasma Sheath ◽

Radio Frequency Discharge ◽

Field Strengths

Download Full-text

Capacitively Coupled Radio Frequency Discharge Plasmas In Hydrogen: Particle Modeling and Negative Ion Kinetics

10.1063/1.1941691 ◽

2005 ◽

Author(s):

P. Diomede

Keyword(s):

Radio Frequency ◽

Negative Ion ◽

Capacitively Coupled ◽

Discharge Plasmas ◽

Particle Modeling ◽

Radio Frequency Discharge

Download Full-text

RADIO FREQUENCY DISCHARGE PLASMA AND HELICON SOURCE FOR DIFFERENT APPLICATIONS

High Temperature Material Processes (An International Quarterly of High-Technology Plasma Processes) ◽

10.1615/hightempmatproc.2015015432 ◽

2014 ◽

Vol 18 (1-2) ◽

pp. 111-117

Author(s):

Victor V. Kuzenov ◽

Tatiana N. Polozova

Keyword(s):

Radio Frequency ◽

Discharge Plasma ◽

Helicon Source ◽

Radio Frequency Discharge

Download Full-text