Doppler-broadened line shapes of atomic hydrogen in a parallel-plate radio frequency discharge

1985 ◽  
Vol 5 (4) ◽  
pp. 317-331 ◽  
Author(s):  
Anthony L. Cappelli ◽  
Richard A. Gottscho ◽  
Terry A. Miller
Keyword(s):  
Radio Frequency ◽  
Atomic Hydrogen ◽  
Parallel Plate ◽  
Line Shapes ◽  
Radio Frequency Discharge

Absolute atomic hydrogen densities in a radio frequency discharge measured by two-photon laser induced fluorescence imaging

1999 ◽  
Vol 85 (2) ◽  
pp. 696-702 ◽  
Author(s):  
L. Chérigier ◽  
U. Czarnetzki ◽  
D. Luggenhölscher ◽  
V. Schulz-von der Gathen ◽  
H. F. Döbele
Keyword(s):  
Radio Frequency ◽  
Fluorescence Imaging ◽  
Atomic Hydrogen ◽  
Laser Induced Fluorescence ◽  
Two Photon ◽  
Radio Frequency Discharge

Efficiency of Parallel-Plate Capacitive Radio Frequency Discharge Plasma

2002 ◽  
Vol 41 (Part 1, No. 7A) ◽  
pp. 4729-4730 ◽  
Author(s):  
Hideki Ikegaki ◽  
Shinjiro Tajima ◽  
Masao Endo ◽  
Hiroshi Amemiya
Keyword(s):  
Radio Frequency ◽  
Parallel Plate ◽  
Discharge Plasma ◽  
Radio Frequency Discharge

Plasma sheath electric field strengths above a grooved electrode in a parallel-plate radio-frequency discharge

1999 ◽  
Vol 27 (1) ◽  
pp. 70-71 ◽  
Author(s):  
U. Czarnetzki ◽  
G.A. Hebner ◽  
D. Luggenholscher ◽  
H.F. Dobele ◽  
M.E. Riley
Keyword(s):  
Electric Field ◽  
Radio Frequency ◽  
Parallel Plate ◽  
Plasma Sheath ◽  
Radio Frequency Discharge ◽  
Field Strengths
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