Radiation Temperature and Enhanced Diffusion in a Radio‐Frequency Discharge

1967 ◽  
Vol 38 (8) ◽  
pp. 3422-3423
Author(s):  
G. S. Harmon ◽  
T. V. Lautzenhiser
Keyword(s):  
Radio Frequency ◽  
Radiation Temperature ◽  
Enhanced Diffusion ◽  
Radio Frequency Discharge

scholarly journals Space and phase resolved plasma parameters in an industrial dual-frequency capacitively coupled radio-frequency discharge

2007 ◽  
Vol 40 (22) ◽  
pp. 7008-7018 ◽  
Author(s):  
J Schulze ◽  
T Gans ◽  
D O'Connell ◽  
U Czarnetzki ◽  
A R Ellingboe ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Dual Frequency ◽  
Plasma Parameters ◽  
Capacitively Coupled ◽  
Radio Frequency Discharge
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