Thermal expansion and elastic properties of plasma‐deposited amorphous silicon and silicon oxide films

1987 ◽  
Vol 50 (16) ◽  
pp. 1059-1061 ◽  
Author(s):  
F. Jansen ◽  
M. A. Machonkin ◽  
N. Palmieri ◽  
D. Kuhman
Keyword(s):  
Thermal Expansion ◽  
Amorphous Silicon ◽  
Elastic Properties ◽  
Silicon Oxide ◽  
Oxide Films

Thermomechanical properties of amorphous silicon and nonstoichiometric silicon oxide films

1987 ◽  
Vol 62 (12) ◽  
pp. 4732-4736 ◽  
Author(s):  
F. Jansen ◽  
M. A. Machonkin ◽  
N. Palmieri ◽  
D. Kuhman
Keyword(s):  
Amorphous Silicon ◽  
Silicon Oxide ◽  
Oxide Films ◽  
Thermomechanical Properties

Nonradiative recombination in strongly interacting silicon nanocrystals embedded in amorphous silicon-oxide films

2009 ◽  
Vol 80 (4) ◽  
Author(s):  
Jeremy A. Rowlette ◽  
Rohan D. Kekatpure ◽  
Matt A. Panzer ◽  
Mark L. Brongersma ◽  
Kenneth E. Goodson
Keyword(s):  
Amorphous Silicon ◽  
Silicon Nanocrystals ◽  
Silicon Oxide ◽  
Oxide Films ◽  
Nonradiative Recombination ◽  
Strongly Interacting ◽  
Amorphous Silicon Oxide

Electrical characterization of hydrogenated amorphous silicon oxide films

2015 ◽  
Vol 54 (8S1) ◽  
pp. 08KB11 ◽  
Author(s):  
Takashi Itoh ◽  
Ryuichi Katayama ◽  
Koki Yamakawa ◽  
Kento Matsui ◽  
Masaru Saito ◽  
...  
Keyword(s):  
Amorphous Silicon ◽  
Silicon Oxide ◽  
Oxide Films ◽  
Hydrogenated Amorphous Silicon ◽  
Electrical Characterization ◽  
Amorphous Silicon Oxide ◽  
Hydrogenated Amorphous
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