Low-temperature solid phase epitaxy for integrating advanced source/drain metal-oxide-semiconductor structures

2010 ◽  
Vol 96 (6) ◽  
pp. 063102 ◽  
Author(s):  
A. Gouyé ◽  
I. Berbezier ◽  
L. Favre ◽  
G. Amiard ◽  
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...  
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pp. 101301 ◽  
Author(s):  
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Tatsuro Maeda ◽  
Wipakorn Jevasuwan ◽  
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Noriyuki Uchida ◽  
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2015 ◽  
Vol 106 (5) ◽  
pp. 051605 ◽  
Author(s):  
Shenghou Liu ◽  
Shu Yang ◽  
Zhikai Tang ◽  
Qimeng Jiang ◽  
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...  

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