The investigation of capture/emission mechanism in high-k gate dielectric soft breakdown by gate current random telegraph noise approach

2008 ◽  
Vol 93 (21) ◽  
pp. 213502 ◽  
Author(s):  
Steve S. Chung ◽  
C. M. Chang
Keyword(s):  
Gate Dielectric ◽  
Emission Mechanism ◽  
Random Telegraph Noise ◽  
Gate Current ◽  
High K ◽  
Telegraph Noise ◽  
Soft Breakdown ◽  
High K Gate Dielectric

Experimental observations of the thermal stability of high-k gate dielectric materials on silicon

2002 ◽  
Vol 303 (1) ◽  
pp. 54-63 ◽  
Author(s):  
P.S. Lysaght ◽  
P.J. Chen ◽  
R. Bergmann ◽  
T. Messina ◽  
R.W. Murto ◽  
...  
Keyword(s):  
Thermal Stability ◽  
Gate Dielectric ◽  
Dielectric Materials ◽  
High K ◽  
Thermal Stability Of ◽  
High K Gate Dielectric
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